2008
DOI: 10.1063/1.2955457
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Influence of film thickness on the crystallization of Ni-doped amorphous silicon samples

Abstract: This work reports on the crystallization of amorphous silicon (a-Si) films doped with 1 at. % of nickel. The films, with thicknesses ranging from 10 to 3000 nm, were deposited using the cosputtering method onto crystalline quartz substrates. In order to investigate the crystallization mechanism in detail, a series of undoped a-Si films prepared under the same deposition conditions were also studied. After deposition, all a-Si films were submitted to isochronal thermal annealing treatments up to 1000 °C and ana… Show more

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Cited by 9 publications
(7 citation statements)
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“…Recently, we have described detailed investigations on the crystallization process of Ni-containing a-Si films by using Raman spectroscopy [12][13][14]. In a similar way, and driven by the above facts, this work reports a study about Mn-containing a-Ge films.…”
Section: Introductionmentioning
confidence: 86%
“…Recently, we have described detailed investigations on the crystallization process of Ni-containing a-Si films by using Raman spectroscopy [12][13][14]. In a similar way, and driven by the above facts, this work reports a study about Mn-containing a-Ge films.…”
Section: Introductionmentioning
confidence: 86%
“…12,20 At this point, it is important to notice that the freezing temperature ͑T f ϳ 50 K͒ obtained in the present work is slightly higher than that reported ͑T f ϳ 20 K͒ for Ge 100−x Mn x films with similar Mn contents. 12,13 Within the possible reasons for this discrepancy one can mention: ͑a͒ the preparation method ͑cosputtering versus thermal evaporation or molecular beam epitaxy͒ and conditions, which can give rise to materials with quite different structural characteristics, 11 ͑b͒ the sample thickness, 21 ͑c͒ the influence of the substrate onto the stress present in the films, 22 ͑d͒ the unintentional presence of impurities, etc. In any case, it is clear that the spin glass phenomenon takes place when a large amount of Mn is inserted in an amorphous host.…”
Section: Resultsmentioning
confidence: 99%
“…These figures are perfectly consistent with those obtained when studying the optical-structural properties of similar Si and SiN films prepared by sputtering. 28,29 It is also opportune to mention that, after annealing at 750 C, the NIR-OMC structure became partially non-homogeneous. This phenomenon can be attributed to differences in the thermal expansion coefficient between the deposited layers and the substrate, to the residual stress experienced by the somewhat thicker films that compose the NIR-OMC structure (Table I), or to a combination of these factors.…”
Section: Cavitymentioning
confidence: 99%