Influence of film structure and composition on diffusion barrier performance of SiOx thin films deposited by PECVD

Grüniger, A.; Bieder, Andrea; Sonnenfeld, Axel; Rohr, Ph. Rudolf von; Müller, Ulrich; Hauert, Roland

doi:10.1016/j.surfcoat.2005.03.044

Cited by 77 publications

(69 citation statements)

References 15 publications

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“…9 The columnar well-defined growth structure obtained by Grü niger et al when using a plasma-enhanced chemical vapor deposition (PECVD) radio frequency plasma apparatus and oxygen as a carrier gas cannot be seen. 10 Furthermore, the uniform phase image (Fig. 7) of plasma-deposited film shows that most likely the HMDSO film is continuous without clear phase separations, even though the topography of the coating shows a depth variation of up to 20 nm in a 5 lm 9 5 lm sample area.…”

Section: Afmmentioning

confidence: 95%

Reel-to-reel inline atmospheric plasma deposition of hydrophobic coatings

et al. 2010

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Plasma deposition equipment was developed and installed at a pilot extrusion coating line for reel-to-reel substrates. Hexamethyldisiloxane was used as a siloxane precursor for the atmospheric plasma deposition of siloxane coatings on substrates of three different categories: paper, polyethylene-coated paper, and textile materials (woven cotton fabric and polypropylene nonwoven). SEM, H 2 O contact angle measurements, heat sealability, and water vapor barrier measurements were carried out to characterize the composition and surface structure of the samples. The potential of the method and the equipment was shown by the coatings, ranging to micrometer scale. With selected samples, hydrophobic coating was shown to form at speeds up to 100 m/min.

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Section: Afmmentioning

confidence: 95%

Reel-to-reel inline atmospheric plasma deposition of hydrophobic coatings

et al. 2010

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“…The wavelength dependence of the refractive index was approximated with a Cauchy model [10]. Reference thickness measurements were performed with a stylus profilometer (Tencor P10).…”

Section: Deposition Rates and Mass Densitymentioning

confidence: 99%

Oxygen permeation, mechanical and structural properties of multilayer diffusion barrier coatings on polypropylene

Körner¹,

Sonnenfeld²,

Heuberger³

et al. 2010

J. Phys. D: Appl. Phys.

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To improve temperature durability for autoclaving of SiO x diffusion barrier coatings on polypropylene, plasma polymerized hexamethyldisiloxane (pp-HMDSO) is applied by plasma enhanced chemical vapour deposition as interlayer material and compared with results obtained with amorphous hydrogenated carbon-nitrogen (a-C : N : H) and a-Si : C : O : N : H interlayers. The influence of the O 2 /HMDSO ratio on the chemical structure and related mechanical and oxygen barrier properties is investigated by fragmentation tests, dilatometry, oxygen transmission rate, internal stress and mass density measurements as well as Fourier transform infrared and x-ray photoelectron spectroscopy. Carbon-rich, polymer-like coatings with low density, low internal stress and excellent adhesive and cohesive properties are found for pp-HMDSO at the expense of barrier performance. In the SiO x /pp-HMDSO coating a broad transition in chemical composition was observed, explaining improved mechanical properties responsible for good barrier performance after thermal cycling or autoclaving.

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“…In particular the nano-sized amorphous SiO x coatings receive considerable attention in packaging industry due to their excellent diffusion barrier performance and high transparent rate. The main advantages of these coatings compared to metallic films are optical transparency, recyclability, and suitability for microwave heating [6] . Common deposition techniques for SiO x films are based on physical vapor deposition (PVD) or plasma-enhanced chemical vapor deposition (PECVD).…”

Section: Introductionmentioning

confidence: 99%

Investigation of Microwave Surface-Wave Plasma Deposited SiO_x Coatings on Polymeric Substrates

Yang¹,

Chen²

2014

Plasma Sci. Technol.

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In this paper, we reported nano-scale SiOx coatings deposited on polyethylene terephthalate (PET) webs by microwave surface-wave assisted plasma enhanced chemical vapor deposition for the purpose of improving their barrier properties. Oxygen (O2) and hexamethyldisiloxane (HMDSO) were employed as oxidant gas and Si monomer during SiOx deposition, respectively. Analysis by Fourier transform infrared spectroscope (FTIR) for chemical structure and observation by atomic force microscopy (AFM) for surface morphology of SiOx coatings demonstrated that both chemical compounds and surface feature of coatings have a remarkable influence on the coating barrier properties. It is noted that the processing parameters play a critical role in the barrier properties of coatings. After optimization of the SiOx coatings deposition conditions, i.e. the discharge power of 1500 W, 2 : 1 of O2 : HMDSO ratio and working pressure of 20 Pa, a better barrier property was achieved in this work.

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Influence of film structure and composition on diffusion barrier performance of SiOx thin films deposited by PECVD

Cited by 77 publications

References 15 publications

Reel-to-reel inline atmospheric plasma deposition of hydrophobic coatings

Reel-to-reel inline atmospheric plasma deposition of hydrophobic coatings

Oxygen permeation, mechanical and structural properties of multilayer diffusion barrier coatings on polypropylene

Investigation of Microwave Surface-Wave Plasma Deposited SiO_x Coatings on Polymeric Substrates

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Influence of film structure and composition on diffusion barrier performance of SiOx thin films deposited by PECVD

Cited by 77 publications

References 15 publications

Reel-to-reel inline atmospheric plasma deposition of hydrophobic coatings

Reel-to-reel inline atmospheric plasma deposition of hydrophobic coatings

Oxygen permeation, mechanical and structural properties of multilayer diffusion barrier coatings on polypropylene

Investigation of Microwave Surface-Wave Plasma Deposited SiOx Coatings on Polymeric Substrates

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Product

Resources

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Investigation of Microwave Surface-Wave Plasma Deposited SiO_x Coatings on Polymeric Substrates