2022
DOI: 10.24996/ijs.2022.63.7.18
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Influence of Fe2O3 Dust Particles on the Plasma Characteristics of D.C Sputtering System

Abstract: This work is an experimental study conducted to study the effects of iron oxide dust particles (Fe2O3) on the characteristics of DC discharge plasma in argon gas under vacuum. Electron temperature ( ) and electron density (ne) were calculated by Boltzmann plots and Stark broadening, respectively. The results show that both the electron density and plasma frequency ( ) increased with the operating pressure. While,  and Debye length ( ) decreased with pressure. The glow discharge is more stable with the Fe2O3-du… Show more

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Cited by 2 publications
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“…The average temperature of the electrons, denoted by T e , and the plasma density, denoted by n e , are the two most important parameters that determine the properties of plasma [21][22][23]. The intensity of electronic transition changes obeys the Boltzmann distribution principle according to the plasma temperature (T e ), the transition probability (A ji ) of the detected line, and the statistical weight (g j ) of its upper level, as presented by the formula [24].…”
Section: Introductionmentioning
confidence: 99%
“…The average temperature of the electrons, denoted by T e , and the plasma density, denoted by n e , are the two most important parameters that determine the properties of plasma [21][22][23]. The intensity of electronic transition changes obeys the Boltzmann distribution principle according to the plasma temperature (T e ), the transition probability (A ji ) of the detected line, and the statistical weight (g j ) of its upper level, as presented by the formula [24].…”
Section: Introductionmentioning
confidence: 99%