2017
DOI: 10.1016/j.surfcoat.2017.01.086
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Influence of europium on structure modification of TiO2 thin films prepared by high energy magnetron sputtering process

Abstract: , J. (2017). Inuence of europium on structure modication of TiO 2 thin lms prepared by high energy magnetron sputtering process.

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Cited by 7 publications
(1 citation statement)
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“…To make immobilized TiO2 films as a photocatalyst to be used multiple times, the good mechanical properties especially adhesion strength for the film are very crucial, as a strong film adhesion onto the substrate determines whether the prepared film is capable to perform in real practices. Magnetron sputtering deposition technology is a common method to prepare TiO2 thin films [12][13][14]. However, there are many factors in the process of magnetron sputtering t influencing the mechanical properties of the film, such as the temperature of the substrate, the sputtering power and the flow rate of the reaction gas in the chamber.…”
Section: Introductionmentioning
confidence: 99%
“…To make immobilized TiO2 films as a photocatalyst to be used multiple times, the good mechanical properties especially adhesion strength for the film are very crucial, as a strong film adhesion onto the substrate determines whether the prepared film is capable to perform in real practices. Magnetron sputtering deposition technology is a common method to prepare TiO2 thin films [12][13][14]. However, there are many factors in the process of magnetron sputtering t influencing the mechanical properties of the film, such as the temperature of the substrate, the sputtering power and the flow rate of the reaction gas in the chamber.…”
Section: Introductionmentioning
confidence: 99%