Abstract:The Porous silica nanoparticles deposited on the glass as well as bare silicon wafer substrate to obtain super hydrophilicity and antireflectivity. The coating is performed by using aerosol impact deposition system using silane, air and helium as precursor gases. The desired coating thickness over the substrate surface is achieved by tuning the RF power, pressures ratio of reaction to deposition chamber and maneuvering of silane flow rate, helium and air mixture. Scanning electron microscopy reveals the partic… Show more
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