2012
DOI: 10.1088/1674-4926/33/1/014009
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Influence of doping position on the extinction ratio of Mach—Zehnder-interference based silicon optical modulators

Abstract: The extinction ratio (ER) of a Mach-Zehnder-interference (MZI) based silicon optical modulator can be strongly influenced by carrier absorption. Moreover, different doping positions can induce different distributions of injected carriers, leading to different ERs. This effect has been experimentally investigated based on the devices fabricated on silicon-on-insulator (SOI) by using a 0.18 m CMOS process. Our experiments indicate that a device with a doping position of about 0.5 m away from the edge of the rib … Show more

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“…Other than these factors, the doping positions of p + and n + from the waveguide are also important. Different positions will cause different free carrier injection distributions in the active region of the micro-ring (Yong et al, 2012). Here, we systematically study the effects of the free carrier injection by varying the highly doped position (n + and p + ) from the rib waveguide.…”
Section: Introductionmentioning
confidence: 99%
“…Other than these factors, the doping positions of p + and n + from the waveguide are also important. Different positions will cause different free carrier injection distributions in the active region of the micro-ring (Yong et al, 2012). Here, we systematically study the effects of the free carrier injection by varying the highly doped position (n + and p + ) from the rib waveguide.…”
Section: Introductionmentioning
confidence: 99%