Influence of developer and proximity effect on morphology of edge roughness in lithographically graded exposures using PMMA

Sarfraz, Sohab

doi:10.1109/inmic.2008.4777707

2008 IEEE International Multitopic Conference 2008

DOI: 10.1109/inmic.2008.4777707

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Influence of developer and proximity effect on morphology of edge roughness in lithographically graded exposures using PMMA

Sohab Sarfraz

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Influence of developer and proximity effect on morphology of edge roughness in lithographically graded exposures using PMMA

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References 15 publications

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