Influence of Deposition Time on Titanium Nitride (TiN) Thin Film Coating Synthesis Using Chemical Vapour Deposition

Abstract

Titanium nitride (TiN) thin film coatings were grown over silicon (p-type) substrate using the atmospheric pressure chemical vapour deposition (APCVD) technique. The synthesis process was carried out to evaluate the effect of deposition time on the physical and mechanical characteristics of TiN coating. Thin films grown over Si substrate were further characterised to evaluate the morphological properties, surface roughness and mechanical properties using a scanning electrode microscope (SEM), atomic force microscopy (AFM) and nanoindentation, respectively. EDS equipped with SEM showed the presence of Ti and N elements in considerable amounts. TiN morphology obtained from the SEM test showed small-sized particles on the surface along with cracks and pores. AFM results revealed that by increasing the deposition time, the surface roughness of the coating also increased. The nanomechanical properties such as nanohardness (H) and Young’s modulus (E), etc., evaluated using the nanoindentation technique showed that higher deposition time led to an increase in H and E. Overall, it was observed that deposition time plays a vital role in the TiN coating deposition using the CVD technique.

Effects of nano-SiO2 particle addition on the structure and properties of micro-arc oxidation ceramic coatings on 7075 aluminum alloy

“…This makes aluminum alloys prone to pitting and crevice corrosion in seawater, posing a significant challenge to their development in the marine and shipbuilding sectors (Trzepiecinski et al , 2022; Wang et al , 2022; Zhao et al , 2023). Currently, surface treatment methods to enhance the corrosion resistance of aluminum alloys include anodic oxidation, thermal spraying, electroplating and vapor deposition (Kikuchi et al , 2021; Koivuluoto, 2022; Ghadai et al , 2023). Among these, micro-arc oxidation (MAO) is a metal surface modification technique.…”