Influence of Deposition Temperature on Residual Stress of Yttria-Stabilized Zirconia Thin Films

Qiling, 肖祁陵 Xiao; Hongbo, 贺洪波 He; Shuying, 邵淑英 Shao; Jianda, 邵建达 Shao; Zhengxiu, 范正修 Fan

doi:10.3788/aos20082805.1007

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“…Magnetron Sputtering. As the glass substrate coated directly on the Ag, it could not achieve a good combination with glass [4], therefore TiO 2 thin films between the substrate glass and Ag film [5]. Its basic principle [6] was shown in Fig.…”

Section: Methodsmentioning

confidence: 99%

Preparation and Contrast of Transparent Conductive TiO<sub>2</sub>/Ag/ZnS Film by Magnetron Sputtering and Evaporation Coating Deposition

Chen

Zhu

Chen

et al. 2011

AMM

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In this paper, TiO2/Ag/TiO2 and TiO2/Ag/ZnS films were prepared by evaporation coating (EC) and magnetron sputtering (MS). To test the resistance and light transmission rate to characterize the coating effect, both the size of indirect resistance that the relative thickness of the situation. By comparing the single magnetron sputtering and evaporation coating fabricated by the two transparent conductive oxide films (TCO) material conductivity and light transmission properties, determine a reasonable process. Firstly, the first layer is TiO2 film by magnetron sputtering, and then coating Ag film and ZnS film plated by evaporation, the final form of TiO2/Ag/ZnS film, which haSubscript textd much higher transmittance than TiO2/Ag/TiO2 at the same resistancSubscript texte.

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Section: Methodsmentioning

confidence: 99%

Preparation and Contrast of Transparent Conductive TiO<sub>2</sub>/Ag/ZnS Film by Magnetron Sputtering and Evaporation Coating Deposition

Chen

Zhu

Chen

et al. 2011

AMM

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show abstract

Study on the Influence of Deposition Temperature on the Properties of Lanthanum Titanate Films

et al. 2022

2022 IEEE 7th Optoelectronics Global Conference (OGC)

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Influence of Deposition Temperature on Residual Stress of Yttria-Stabilized Zirconia Thin Films

Cited by 2 publications

References 0 publications

Preparation and Contrast of Transparent Conductive TiO<sub>2</sub>/Ag/ZnS Film by Magnetron Sputtering and Evaporation Coating Deposition

Preparation and Contrast of Transparent Conductive TiO<sub>2</sub>/Ag/ZnS Film by Magnetron Sputtering and Evaporation Coating Deposition

Study on the Influence of Deposition Temperature on the Properties of Lanthanum Titanate Films

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