Influence of deposition rate on interface width of Mo/Si multilayers

Zhao, Jiaoling; Yao, Kui; Wang, Hu; Fang, Ming; Wang, Bin; Hu, Guoping; He, Hongbo

doi:10.1016/j.tsf.2015.06.009

Cited by 5 publications

(2 citation statements)

References 27 publications

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“…In order to realize the sharp interface, interface roughness and interface diffuseness have been recognized as two main aspects to be pursued. Recently, much work has been done to avoid the interface imperfections, such as deposition rate [6] , thickness uniformity [7] , and interface engineering [8][9][10][11] . The secondary ion mass spectrometry technique indicated that the interface roughness of the Si-on-Mo layer was varying from 1.1 to 2.2 nm [9] .…”

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confidence: 99%

Interface characterization of Mo/Si multilayers

Zhao

Wang

et al. 2016

中国光学快报

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Complementary analysis techniques are applied in this work to study the interface structure of Mo/Si multilayers. The samples are characterized by grazing incident x-ray reflectivity, x-ray photoelectron spectroscopy, high-resolution transmission electron microscopy, and extreme ultraviolet reflectivity. The results indicate that the layer thickness is controlled well with small diffusion on the interface by forming MoSi 2 . Considering MoSi 2 as the interface composition, simulating the result of our four-layer model fits well with the measured reflectivity curve at 13.5 nm.

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confidence: 99%

Interface characterization of Mo/Si multilayers

Zhao

Wang

et al. 2016

中国光学快报

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“…Large initial tensile and compressive stresses were found in the Mo and Si layer respectively, suggesting interface formation. The interface formation of the Mo/Si system is known and investigated [38,39,40,41,42,43], for 1. 6.…”

Section: Scope and Outline Of The Thesismentioning

confidence: 99%

In-situ stress analytics at sub-nanoscale thin film growth

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Cover:A view into the deposition setup while in operation. This is the deposition setup that is used for most of the results presented in this work. The plasma generated by the magnetrons lights up the inside of the deposition setup with a characteristic glow. The front page view looks from the bottom up towards the sample (not visible) via a mirror. The back page view looks from the side and is unique, as the top of the magentron is visible. During normal operation this view is shielded to avoid deposition onto the viewport of the setup, only shortly after installation there was a moment when this shielding was not in place.

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