Influence of deposition pressure on the adhesion of ZnO thin films deposited by cathodic vacuum arc deposition on polyimide foil substrates

Changji, Hu; He, Zhenhui; Fu, Weichun; Zhong, Qi

doi:10.1088/0022-3727/42/18/185303

Cited by 11 publications

(4 citation statements)

References 24 publications

(31 reference statements)

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“…Deposition pressure has a marked effect on ZnO thin films deposited by this technique on polyimide foil substrates as studied by Changji et al The thin films exhibits good adhesive properties at the low deposition pressure. 230 High deposition rates in the range from 50-500 Å/second have been reported for this deposition process. As this technique also involve the formation of macro-particles with diameters ranging from 0.5 to 50 m along with the atomic and ionic evaporate, appearance, morphology and physical properties are degraded.…”

Section: Cathodic Arc Vapour Deposition Techniquementioning

confidence: 76%

ZnO nanostructured thin films: Depositions, properties and applications—A review

Kumar¹,

Kumar²,

Aldossary³

et al. 2015

Mat Express

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The present review focuses on the growth, properties and applications of ZnO thin films grown by various physical deposition techniques. An overview on several deposition methods such as thermal evaporation, arc deposition, pulse laser deposition and sputtering for the growth of ZnO thin films are discussed in this review. Several factors such as substrate temperature, gas pressures, oxygen partial pressures, and post growth annealing temperatures which influence the properties of ZnO thin films are also discussed. Various ZnO thin film properties such as surface morphologies, surface film thickness, grain size, optical transmittance, sensitivity, electrical conductivity, uniformity and electrical resistivity are presented in this review. In addition, numerous applications of ZnO thin films, for instance, thin film based gas sensors, surface acoustic wave (SAW) devices; thin film transistors (TFTs), light emitting diodes (LEDs) and solar cells are discussed.

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Section: Cathodic Arc Vapour Deposition Techniquementioning

confidence: 76%

ZnO nanostructured thin films: Depositions, properties and applications—A review

Kumar¹,

Kumar²,

Aldossary³

et al. 2015

Mat Express

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“…Understanding of the fracture behavior of flexible thin films is known to be complicated with interdependency of the physical parameters such as grain size, roughness, defects, and thickness. For instance, Changji et al 27 and Balakrisnan et al 28 have reported that pores and dislocations in films facilitate crack initiation, while grain boundaries provide an easy path for crack propagation. An extra energy is required for crack propagation if a higher effective density of grain boundary (or smaller grains) is present.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

Tensile Stress-Dependent Fracture Behavior and Its Influences on Photovoltaic Characteristics in Flexible PbS/CdS Thin-Film Solar Cells

Lee

Yeon

Mohanty

et al. 2015

ACS Appl. Mater. Interfaces

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Tensile stress-dependent fracture behavior of flexible PbS/CdS heterojunction thin-film solar cells on indium tin oxide-coated polyethylene terephthalate (PET) substrates is investigated in terms of the variations of fracture parameters with applied strains and their influences on photovoltaic properties. The PbS absorber layer that exhibits only mechanical cracks within the applied strain range from ∼0.67 to 1.33% is prepared by chemical bath deposition at different temperatures of 50, 70, and 90 °C. The PbS thin films prepared at 50 °C demonstrate better mechanical resistance against the applied bending strain with the highest crack initiating bending strain of ∼1.14% and the lowest saturated crack density of 0.036 μm(-1). Photovoltaic properties of the cells depend on the deposition temperature and the level of applied tensile stress. The values of short-circuit current density and fill factor are dramatically reduced above a certain level of applied strain, while open-circuit voltage is nearly maintained. The dependency of photovoltaic properties on the progress of fractures is understood as related to the reduced fracture energy and toughness, which is limitedly controllable by microstructural features of the absorber layer.

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“…The generation of an electrostatic potential produced by the plasma, and the interaction between metallic plasma and neutral gas, such as elastic collisions and charge-exchange reaction, have a strong influence on the ion energy, and ion flux distribution. For instance, Changji et al [20] found that the energy of Zr (Zirconium) ions arriving at the substrate decreases significantly with the deposition pressure. This effect explains the fact that the adhesion decreases as the deposition pressure increases.…”

Section: Introductionmentioning

confidence: 99%

Numerical analysis of the cathodic material influence on the arc plasma jet

Narvaez

Álvarez²,

Ramírez

et al. 2019

Rev. Mex. Fís.

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The cathodic arc discharge is a deposition technique widely used to synthesize hard coatings and thin films. The structure of the plasma generated by the electrical discharge and its interaction with neutral particles was studied using numerical simulations. Typical plasma parameters were characterized considering their spatial and temporal dependence, as well as several cathode materials that are commonly used in these systems. For the evolution of the ion density, it was observed the formation of Knudsen layer, and also a dependence of pressure gradients in the global behavior. With respect to the kinetic energy, it was found a deceleration of ions, which is represented by a shock front produced in the plasma−neutrals interaction. On the other hand, the energy releasing was generated due to the heat transference between electrons and ions. The plasma potential follows a behavior, which is similar to that of the ion density, and it is caused by the dynamics of charged particles which is directly affected by the concentration of neutrals and ions. In general, the physical quantities are directly affected by electrical and thermal conductivity of the cathode material. Our results can be applied to understand the plasma phenomena produced in a cathodic arc discharge

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Influence of deposition pressure on the adhesion of ZnO thin films deposited by cathodic vacuum arc deposition on polyimide foil substrates

Cited by 11 publications

References 24 publications

ZnO nanostructured thin films: Depositions, properties and applications—A review

ZnO nanostructured thin films: Depositions, properties and applications—A review

Tensile Stress-Dependent Fracture Behavior and Its Influences on Photovoltaic Characteristics in Flexible PbS/CdS Thin-Film Solar Cells

Numerical analysis of the cathodic material influence on the arc plasma jet

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