Extended defects such as dislocations were induced by nano‐ and microindentation in GaN layers grown by molecular beam epitaxy on 6H‐SiC. The resulting local variation of the strain and optical properties were investigated by spectrally and spatially resolved cathodoluminescence. The microindentation causes an evolution of dark‐line defects, compressive strain within the region of the defects, and cracking along directions determined by the symmetry of the arrangement of the dark‐line defects. The evolution of extended dark‐line defects is correlated with the dislocation structure, which was analyzed by transmission electron microscopy measurements of the plastically deformed indented regions.