Influence of cylindrical magnetron sputtering configurations on plasma characteristics

Bard, Alaa Khamees; Abbas, Qusay Adnan

doi:10.1016/j.ijleo.2022.170346

Cited by 3 publications

(3 citation statements)

References 11 publications

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“…The spectra display five emission peaks of neutral argon (ArIl) at 361.181, 427.752, 434.806, 476.486, and 487.986 nm, in addition to five atomic emission peaks of argon (ArI) located at 419.831, 687.128, 696.543, 706.873, and 738.398 nm. It is clear from these data that the increase in the coil current (0,2,4,6 Amp) led to an increase in the emission peak intensity of all emission peaks (both atomic and ionic peaks) due to an increase in the number of inelastic collisions that took place in the plasma as a result of plasma confinement [13].…”

Section: Emission Spectra Of Plasma Without Magnetic Fieldmentioning

confidence: 86%

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Influence of A.C. Frequency on Hollow Magnetron Sputtering Discharge Parameters

Hasan,

Abbas

2024

IJP

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In the present work, optical emission spectroscopy was used to diagnose the influence of A.C. power source frequency on the hollow magnetron sputtering discharge parameters (such as discharge emission, discharge current and voltage, glow discharge structure, temperature (Te) and electron number density (ne), Debye length (λD), and plasma parameter (ND) of constant pressure. The electron temperature and number density were determined using the Boltzmann plots and the Stark broadening methods, respectively. The results illustrate that the normal glow discharge structure is similar to the D.C. discharge mode. The magnetic field has no impact on the fundamental discharge parameter in both A.C. frequencies under study. On the other hand, the other discharge parameters (Te, ne, λD and ND) increase with increasing the magnetic field in both discharge frequencies. In addition, the increase in the frequency of the A.C. source current led to an increase in the discharge intensity emission and the other discharge parameters being studied. In this case, in frequency 7 kHz, Te surged from 0.685 eV to 0.839 eV, and ne experienced an increase from 3.088 x 1018 m-3 to 4.902 x 1018 m-3. At a frequency of 9 kHz, the electron temperature surged from 0.711eV to 0.911 eV. ne experienced an increase from 3.615 x 1018 m-3 to 6.749 x 1018 m-3.

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Section: Emission Spectra Of Plasma Without Magnetic Fieldmentioning

confidence: 86%

“…The electrons temperature (T e ) is the most significant factor in describing the plasma state. T e can be calculated using the Boltzmann plot method as follows [13][14][15][16][17][18][19]:…”

Section: Methodsmentioning

confidence: 99%

Influence of A.C. Frequency on Hollow Magnetron Sputtering Discharge Parameters

Hasan,

Abbas

2024

IJP

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“…The collisions in plasma cause Stark broadening of the spectral lines. A sharp broadening of an emission line or the linear density ratio of several emissions for the same element can be used to compute the electron density [16,17]. The electron density (n e ) can be calculated using the Stark broadening relation [18,19]:…”

Section: Methodsmentioning

confidence: 99%

Spectral Analysis of Al Arc Discharge Plasma Generated in ZnO/DDDW Colloid

Badran,

Kadhem

2024

IJP

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This study aims to investigate the aluminum (Al) arc plasma parameters generated through the explosive strip technique. The research involves the measurement of key plasma characteristics such as plasma frequency (fp), Debye length, and Debye number. The electron temperature (Te) and electron density (ne) of the plasma were calculated utilizing the Boltzmann plot and Stark expansion method. Analysis of the optical emission spectrum revealed distinctive peaks corresponding to oxygen, Al, and zinc oxide (ZnO) within the plasma. The outcomes of the study demonstrated a noteworthy correlation between the applied current and the electron temperature and density. Specifically, as the current increases, both electron temperature and density increase. The electron temperature of the Al plasma increased from the range of 0.852 eV to 0.92404 eV, accompanied by a corresponding elevation in electron density from 13.1× 1017 cm-3 to 15.2× 1017 cm-3. Furthermore, the detonation of the Al strip within a ZnO suspension led to even more pronounced changes. In this case, the electron temperature surged from 0.92885 eV to 1.1012 eV, and the electron density experienced an increase from 37.7 × 1017 cm-3 to 44.7 × 1017 cm-3.

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Hardness and Microstructure of TiN Coating on Aluminum Alloy with DC Sputtering

Margono,

Darmadi,

Widodo

et al. 2024

MSF

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Titanium Nitride coating has attracted much interest in increasing the hardness of aluminum alloys. This study aims to investigate the effect of Ar: N gas mixture and time on increasing the hardness of aluminum alloys using DC sputtering. Preparation of TiN thin films on aluminum alloy substrates using flowing gas mixture parameters and time. First, the layer of TiN was deposited on the sample with a gas mixture of 90Ar:10N; 80Ar:20N; 70Ar:30N; and 60Ar:40N (%) for 60 minutes. Then the optimum gas mixture that produces the highest surface hardness is used in the second process with time variations of 30, 60, 90, and 120 minutes. The results showed that the highest hardness was achieved in a gas mixture of 70Ar:30N and 60 minutes. The TiN phase formed on the aluminum surface was identified by XRD, while the surface morphology was observed by SEM. Compared with untreated samples, the hardness of treated samples increased significantly.

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Influence of cylindrical magnetron sputtering configurations on plasma characteristics

Cited by 3 publications

References 11 publications

Influence of A.C. Frequency on Hollow Magnetron Sputtering Discharge Parameters

Influence of A.C. Frequency on Hollow Magnetron Sputtering Discharge Parameters

Spectral Analysis of Al Arc Discharge Plasma Generated in ZnO/DDDW Colloid

Hardness and Microstructure of TiN Coating on Aluminum Alloy with DC Sputtering

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