Influence of cold plasma on material removal behavior during diamond grit scratching single crystal silicon

Wang, Ziheng; Duan, Zhenjing; Wang, Shuaishuai; Li, Yuheng; Zhou, Yuyang; Liu, Jiyu; Liu, Xin

doi:10.1016/j.colsurfa.2024.135630

Colloids and Surfaces A: Physicochemical and Engineering Aspect

2024

DOI: 10.1016/j.colsurfa.2024.135630

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Influence of cold plasma on material removal behavior during diamond grit scratching single crystal silicon

Ziheng Wang,

Zhenjing Duan,

Shuaishuai Wang

et al.

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Influence of cold plasma on material removal behavior during diamond grit scratching single crystal silicon

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References 57 publications

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