The emission of charge carriers from quantum dots (QDs) into a semiconductor matrix is of considerable interest in fundamental and applied aspects [1][2][3]. A photoelectric signal in the region of the interband optical absorption of QDs appears as a result of the emission of photoexcited electrons and holes from dimensional quantization levels into the matrix of a semiconductor. Emission can occur via three mecha nisms [3]: the overbarrier thermal, the tunnel, and the thermally activated tunnel mechanism via an interme diate excitation level. The role of each of these mech anisms depends on the way and the conditions at which the structures with QDs are grown, on the shape of the potential barrier in the QDs which can be varied by applying external stress to the structure, and on the measurement temperature. Since recombination tran sitions compete with emission transitions, the effec tiveness of emission can also be affected by the forma tion of defects in the structure. Devices on quantum dimensional heteronanostructures (QDHs) are designed using various technological operations (anodic oxidation, etching, metal deposition, ion implantation etc.) which can be accompanied by the formation of defects in the structure as a result of chemical reactions on the surface and in the bulk of the semiconductor. Earlier, in [1-3], emission mech anisms in QDHs grown by molecular beam epitaxy were studied. In this work, we study the emission of charge carriers from QDHs grown by vapor phase epi taxy from metalorganic compounds (MOVPE) and how it is affected by electric field, temperature, and defect formation upon anodic oxidation of the QDH surface.The studied QDHs with InAs/GaAs QDs were grown on the (100) surface of a semi insulating and conducting GaAs substrates by MOVPE at the atmo spheric pressure of hydrogen, which acted as a gas car rier of the metalorganic compounds [4]. A buffer n GaAs layer with a thickness of ≈0.6 µm and an elec tron concentration of ∼10 16 cm -3 was grown at a tem perature of 650°C. Then, at a temperature of 520°C, an InAs QD layer with a nominal thickness of about five monolayers was grown via laser doping of the layer with a bismuth surfactant [4], which made it possible to obtain more homogeneous QDs. We studied struc tures with a QD layer covered by a GaAs coating layer with a thickness of 20 nm.Anodic oxidation of the GaAs surface was carried out in the galvanostatic mode at a current density of 1 mA/cm 2 in a solution of ammonium pentaborate in a mixture of ethylene glycol and water. The thickness of the oxide layer d ox was determined by the growth constant (2 nm/V) and was 20 nm. Formation of the oxide layer with the thickness d ox consumes a GaAs layer with a thickness of 0.67 d ox [5].The energy spectrum of the QDH was studied by photocurrent and photo emf spectroscopy in the Schottky barrier (the PSB spectroscopy). To create a Schottky barrier, a semitransparent rectifying gold con tact with an area of ~1 mm 2 was deposited onto the sur face of nonoxidized and oxidized structures by...