Influence of binding agent on the cutting performance and wear characteristics of catalytic composite abrasive cluster

Abstract

To improve the polishing efficiency and process stability of catalytic composite abrasive clusters (CCAC), the CCAC containing different binding agent ratios were investigated in this study. Five groups of CCAC with different binding agent ratios were prepared for friction chemical polishing (FCP) of silicon carbide (SiC) respectively. Based on material removal rate (MRR) and surface roughness (Ra) as evaluation metrics, the polishing performance of five groups of CCAC were compared. Subsequently, wear experiments were carried out by the block-shaped CCAC (the diameter is 1.6mm) and the single crystal diamond (SCD) abrasives with the same particle size. The friction coefficient and the cross-sectional area of the worn area were measured to evaluate the effect of binding agent content on the performance of continuous cutting and the tribological properties of the abrasive. The experimental results showed that the proportion of binding agent in CCAC directly affects the processing performance of abrasives. When the proportion of binding agent in the abrasive is 25%, the CCAC has highest machining efficiency (MRR reaches 330.535 nm/min) and better surface roughness (Ra reaches 22.741 nm). This study provides certain theoretical guidance for achieving efficient polishing of SiC wafers.