Influence of bias voltage on the microstructure, mechanical and corrosion properties of AlSiN films deposited by HiPIMS technique

Ding, Ji Cheng; Wang, Qi Min; Liu, Zhe R.; Jeong, Seonhee; Zhang, Teng Fei; Kim, Kwang Ho

doi:10.1016/j.jallcom.2018.09.063

Cited by 34 publications

(9 citation statements)

References 34 publications

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“…As known, the corrosion rate of a coating is directly proportional to the icorr value [88], and a low Ecorr value indicates an augmented thermodynamic tendency of the material to corrode [89]. Consequently, lower icorr values and increased positive Ecorr values represent a clear indication of better corrosion resistance [90,91]. As known, the grain boundary and voids can modify the kinetics of hydrogen evolution during the electrochemical process [92].…”

Section: In Vitro Corrosion Testsmentioning

confidence: 99%

In Vitro Corrosion of Titanium Nitride and Oxynitride-Based Biocompatible Coatings Deposited on Stainless Steel

et al. 2020

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The reactive cathodic arc deposition technique was used to produce Ti nitride and oxynitride coatings on 304 stainless steel substrates (SS). Both mono (SS/TiN, SS/TiNO) and bilayer coatings (SS/TiN/TiNO and SS/TiNO/TiN) were investigated in terms of elemental and phase composition, microstructure, grain size, morphology, and roughness. The corrosion behavior in a solution consisting of 0.10 M NaCl + 1.96 M H2O2 was evaluated, aiming for biomedical applications. The results showed that the coatings were compact, homogeneously deposited on the substrate, and displaying rough surfaces. The XRD analysis indicated that both mono and bilayer coatings showed only cubic phases with (111) and (222) preferred orientations. The highest crystallinity was shown by the SS/TiN coating, as indicated also by the largest grain size of 23.8 nm, which progressively decreased to 16.3 nm for the SS/TiNO monolayer. The oxynitride layers exhibited the best in vitro corrosion resistance either as a monolayer or as a top layer in the bilayer structure, making them a good candidate for implant applications.

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Section: In Vitro Corrosion Testsmentioning

confidence: 99%

In Vitro Corrosion of Titanium Nitride and Oxynitride-Based Biocompatible Coatings Deposited on Stainless Steel

et al. 2020

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“…The cross-sectional SEM images (Figure 5) illustrated that the coatings were integrated, dense and even in thickness. It could be observed that the bias voltage applied on the substrate had a big impact on the coatings' deposition speed, and it gradually dropped from about 16.7 nm/min (2.5 μm/150 min) to 13.3 nm/min (2.0 μm/150 min), resulting in a decrease in thickness from 2.5 to 2 μm when the bias voltage changed from 0 to −200 V. This was due to enhanced flux of ions impinging on the growing HfC coating, resulting in the occurrence of re-sputtering with the bias voltage rising [34]. The surface morphologies of the HfC coatings are presented in Figure 6.…”

Section: Xrd Xps Tem and Afm Analysismentioning

confidence: 99%

The Effects of Substrate Bias on the Properties of HfC Coatings Deposited by RF Magnetron Sputtering

Wang

Ding

et al. 2021

Coatings

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In the paper, by using radio frequency (RF) magnetron sputter technology, the HfC coating grew on a 316L stainless steel substrate in an Ar atmosphere at various substrate bias voltages from 0 to −200 V. From the X-ray diffraction (XRD) and transmission electron microscopy (TEM) experiments, the HfC coatings were well crystallized and (111) preferential growth had been successfully obtained by controlling bias voltage at −200 V. Nanoindentation experimental results for the prepared HfC coatings indicated that they possessed the maximum nanohardness due to the formation of the (111) orientation. The results of electrochemical measurements displayed that 316L stainless steel (316L) coated with the HfC coatings had better corrosion resistance than bare 316L. With the bias voltage increasing to −200 V, adhesion of the 316L substrate with the HfC coating could be greatly improved, as well as corrosion resistance. The antithrombogenicity of the HfC coatings was identified by platelet adhesive and hemolytic ratio assay in vitro. It was shown that the hemocompatibility of coated 316L had been improved greatly compared with bare 316L and the HfC coatings possessed better antithrombogenicity with the bias voltage elevating above −150 V.

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“…The increase on the corrosion resistance could be attributed to the formation of a dense structure, which can block the paths of corrosion medium to the substrate. It has been demonstrated to nanocomposite films, such as: Ti▬Si▬N [102], Al▬Si▬N [103], Nb▬Si▬N [71], and W▬Si▬N and Zr▬Si▬N [104].…”

Section: Electrochemical Propertiesmentioning

confidence: 99%

Effect of Silicon Content in Functional Properties of Thin Films

Vanegas¹,

Alfonso²,

Olaya³

2019

Silicon Materials

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Silicon (Si) has been the paradigm of the electronic industry, because it has been used in fabrication of different electronic circuit elements such as diodes, operational amplifiers, transistors, and in the last few decades, it has been the base material of the development of solar energy industry. However, other research fields in which the physical and chemical properties of Si have demonstrated to be relevant to applications in areas such as the mechanical, optical, electrical, and electrochemical are less known. Therefore, it is relevant to know the technology that has generated materials with new or better physical and chemical properties, such as the nanocomposite materials that have been growing in thin films. These films exhibiting new properties with respect to the bulk material and with the addition of Si, have demonstrated to improve the properties of the transition metal nitride (MeN), obtaining thin films with a high nanohardness, wear resistance, corrosion resistance, and high thermal stability. Therefore, the main objective of this chapter is to know the role that plays the incorporation Si in growth, microstructure, chemical composition, and functional properties of ZrN thin films.

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Influence of bias voltage on the microstructure, mechanical and corrosion properties of AlSiN films deposited by HiPIMS technique

Cited by 34 publications

References 34 publications

In Vitro Corrosion of Titanium Nitride and Oxynitride-Based Biocompatible Coatings Deposited on Stainless Steel

In Vitro Corrosion of Titanium Nitride and Oxynitride-Based Biocompatible Coatings Deposited on Stainless Steel

The Effects of Substrate Bias on the Properties of HfC Coatings Deposited by RF Magnetron Sputtering

Effect of Silicon Content in Functional Properties of Thin Films

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