INFLUENCE OF ANNEALING ON THE PHYSICAL AND MECHANICAL PROPERTIES OF (TiSi)N/CrN MULTILAYER COATINGS PRODUCED BY CATHODIC ARC PHYSICAL VAPOR DEPOSITION

Abstract

In this work, the effect of annealing temperatures on the mechanical characteristics of (TiSi)N/CrN multilayer coatings obtained at a different working pressure of nitrogen and negative bias potential applied to the substrate was studied. The (TiSi)N/CrN multilayer coatings were obtained by vacuum-arc deposition using two electric arc evaporators with chromium and titanium-silicon cathodes under the regime of continuous substrate rotation. The element composition, phase state, and substructural parameters, and mechanical properties of the coatings under the influence of temperature were investigated. The X-ray analysis showed the presence of three phases in the coatings: cubic titanium nitride TiN and chromium CrN and tetragonal titanium nitride Ti<sub>2</sub>N. The microdeformation level of the initial coatings was high, 7.5 × 10<sup>-3</sup>. After annealing at temperatures of 400°C and 700°C, the phase composition of the coatings did not change. In contrast to the lower temperature annealing at 400°C, annealing at 700°C led to a decrease in the lattice parameters of all phases as compared to those in the initial state. These results indicate the thermal relaxation of stresses with the decrease of microdeformation level to 7.32 × 10<sup>-3</sup>.