Hydrogenated amorphous carbon (a-C:H) ®lms were deposited on double-side polished germanium substrates by RF plasma-assisted chemical vapour deposition method using benzene as a precursor, and their optical properties were investigated in the wavelength range from 700 nm to 10 mm. In particular, we used a dispersion-function-based non-linear regression to ®t the re¯ectance in the range from 700 to 1800 nm and the baselines of the infrared transmittance in the range from 1000 to 5000 cm À1 , respectively. Optical constants determined in both ranges, together with their respective thickness values, showed overall consistency. As a function of self-bias, we found that the refractive index increased while the band gap decreased, which was indicative of ®lm densi®cation and increase of sp 2 -bonded carbons. Detailed information on the selfbias-dependent evolution of microscopic bonding structure in a-C:H ®lms was revealed via the quantitative vibrationabsorption spectra in the mid-infrared region, which was obtained after taking Urbach-tail-like electronic absorption into consideration. More speci®cally, it was found that as self-bias was increased hydrogen content decreased, ole®nic sp 2 -bonding decreased while aromatic sp 2 -bonding increased, and more carbon bonding was distorted due to increased cross-linking. Maximum sp 2 -bonding was observed between À300 and À400 V of self-bias. #