Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing

Kim, Hyuk-Min; Venkatesh, R.; Kwon, Tae-Young; Park, Jin-Goo

doi:10.1016/j.colsurfa.2012.07.009

Cited by 24 publications

(7 citation statements)

References 20 publications

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“…Phosphate laser glass was used as gain medium in many high-power and high-energy laser devices, because of its long fluorescence life and good gain ability. However, the hardness of phosphate laser glass was much lower than that of other wafers such as Si [7], quartz [8], diamond [9], and sapphire [10]. Another issue with phosphate laser glass was that processing of large-aperture glass was difficult and time consuming.…”

Section: Introductionmentioning

confidence: 99%

Factor Effect on Material Removal Rate During Phosphate Laser Glass Polishing

Chen

Yao

Yang

et al. 2014

Materials and Manufacturing Processes

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In this work, the effects of different process parameters on the material removal rate (MRR) of phosphate laser glass during ring polishing had been investigated. Experiments were performed on a ring polishing machine that had a pad diameter of 4.4 m, and the MRR was obtained by the measurements of depth reduction of a groove on phosphate glass sample. The experimental results and analyses showed that size of the abrasive particles and the ceria concentration had significant effects on the polishing rate. The MRR of glass being polished on the annular-grooved pad was almost three times as when polished on the square-grooved pad. When the pad was periodically cleaned with water and glass was polished with fresh slurry, the value of MRR tended to be constant. Based on the experimental results, a combined process was designed to optimize MRR. The results of this study provided the essential foundation for obtaining the required MRR and optimizing the fabrication technique.

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Section: Introductionmentioning

confidence: 99%

Factor Effect on Material Removal Rate During Phosphate Laser Glass Polishing

Chen

Yao

Yang

et al. 2014

Materials and Manufacturing Processes

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“…Figure 1 displays that increasing the dispersant amount excess than 2.5 wt %, slightly increases the slurry viscosity. The reason for this increase is that in the slurry containing 3.20 wt % of the dispersant, the slurry particles are saturated with the dispersant and the free ions in the slurry increased with viscosity [31]. It is observed that the viscosity curve of 1.8 % TPP in the range of 40-110 1/s is lower than the viscosity curve of 2.5 % TPP.…”

Section: Characterization Of Composite 1 1 Slurry Rheology and Dispersant Amountmentioning

confidence: 95%

Preparation of Porous Alumina/Nano-Nickel Composite by Gel Casting and Carbothermic Reduction

Hosseini

Mollazadeh

Khaki

et al. 2022

IJE

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Effects of dispersant (Tri polyphosphate sodium) amount on gel viscosity, mechanical activation of raw materials, raw materials mixture composition, and reduction atmosphere on the prepared composites and NiO reduction mechanism were investigated. It was found that 2.5 wt % dispersant is an optimum amount for a gel suspension with 50 V% of solid consisting of alumina, graphite, and nickel oxide. XRD results of reduced and sintered product (at 1200-1500 °C) showed that alumina, nickel, and nickel aluminate spinel are present in the prepared composite. The porosity of the composite made with 12 h ball milledalumina was 48%, while it was 64 % in the sample made with 20 min ball-milled alumina. The results of TG-DTA analyses showed that the reduction temperature and mechanism are dependent on the raw materials' ball milling time. Thermal analyses revealed that mechanical activation of raw materials decreases the NiO reduction temperature and increases the metallic Ni production.

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“…Currently, measurements of particle size distribution 8–10 and rheological properties 1,11–14 as well as sedimentation tests 13–15 are used to evaluate the particle dispersion state in a slurry, and the optimization of the slurry condition is managed using these methods. However, by comparison with these slurry evaluation results, some unexpected results suggested that the slurry conditions whose particles appeared to be most dispersed differed depending on the evaluation method 16,17 . In addition, the densest green body was not necessarily obtained by the slurry with the most dispersed particles identified via the slurry evaluation 18–23 .…”

Section: Introductionmentioning

confidence: 93%

“…In addition, the densest green body was not necessarily obtained by the slurry with the most dispersed particles identified via the slurry evaluation 18–23 . For example, Kim et al 16 investigated aqueous CMP slurry containing silica particles; an apparent viscosity measurement and sedimentation test were conducted, and subsequently, the optimal slurry condition was specified; however, the viscosity of the slurry and the result of sedimentation did not completely correspond, and the reason was not elaborated. Additionally, Davies and Binner 19 studied the dispersant adsorption behavior, particle dispersion state, and green body density obtained from aqueous alumina slurry.…”

Section: Introductionmentioning

confidence: 99%

Effect of medium condition change on green body density during casting and drying

Iwata

Yamada

Mori

2020

Int J Applied Ceramic Tech

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The present study examined whether the optimum slurry conditions in which the green body with the highest packing fraction was fabricated were the same regardless of whether tape or slip casting methods were used. Additionally, we investigated the optimum slurry evaluation method to predict the packing fraction of each green body. Specifically, aqueous dense alumina slurries, whose particle dispersion state was changed by varying pH and the amount of dispersant additive, were prepared. After changing the pH, the optimum slurry conditions were achieved regardless of the casting method. The most suitable amount of additive dispersant differed due to the changing solution conditions during the casting and drying process; the medium of the slurry permeated into the plaster during slip casting and dried on the substrate during tape casting. Thus, in slip casting, non‐adsorbed polymers could also be permeated. Hence, it is crucial for slurry evaluation to predict the packing fraction of the slip cast body. A sedimentation test, which involved particle condensation as well as casting, was valid for the green sheet. Conversely, it was experimentally shown that the constant pressure filtration test, which involved the permeation of the medium in addition to particle condensation, was suitable for slip casting.

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Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing

Cited by 24 publications

References 20 publications

Factor Effect on Material Removal Rate During Phosphate Laser Glass Polishing

Factor Effect on Material Removal Rate During Phosphate Laser Glass Polishing

Preparation of Porous Alumina/Nano-Nickel Composite by Gel Casting and Carbothermic Reduction

Effect of medium condition change on green body density during casting and drying

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