2012
DOI: 10.1016/j.colsurfa.2012.07.009
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Influence of anionic polyelectrolyte addition on ceria dispersion behavior for quartz chemical mechanical polishing

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Cited by 24 publications
(7 citation statements)
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“…Phosphate laser glass was used as gain medium in many high-power and high-energy laser devices, because of its long fluorescence life and good gain ability. However, the hardness of phosphate laser glass was much lower than that of other wafers such as Si [7], quartz [8], diamond [9], and sapphire [10]. Another issue with phosphate laser glass was that processing of large-aperture glass was difficult and time consuming.…”
Section: Introductionmentioning
confidence: 99%
“…Phosphate laser glass was used as gain medium in many high-power and high-energy laser devices, because of its long fluorescence life and good gain ability. However, the hardness of phosphate laser glass was much lower than that of other wafers such as Si [7], quartz [8], diamond [9], and sapphire [10]. Another issue with phosphate laser glass was that processing of large-aperture glass was difficult and time consuming.…”
Section: Introductionmentioning
confidence: 99%
“…Figure 1 displays that increasing the dispersant amount excess than 2.5 wt %, slightly increases the slurry viscosity. The reason for this increase is that in the slurry containing 3.20 wt % of the dispersant, the slurry particles are saturated with the dispersant and the free ions in the slurry increased with viscosity [31]. It is observed that the viscosity curve of 1.8 % TPP in the range of 40-110 1/s is lower than the viscosity curve of 2.5 % TPP.…”
Section: Characterization Of Composite 1 1 Slurry Rheology and Dispersant Amountmentioning
confidence: 95%
“…Currently, measurements of particle size distribution 8–10 and rheological properties 1,11–14 as well as sedimentation tests 13–15 are used to evaluate the particle dispersion state in a slurry, and the optimization of the slurry condition is managed using these methods. However, by comparison with these slurry evaluation results, some unexpected results suggested that the slurry conditions whose particles appeared to be most dispersed differed depending on the evaluation method 16,17 . In addition, the densest green body was not necessarily obtained by the slurry with the most dispersed particles identified via the slurry evaluation 18–23 .…”
Section: Introductionmentioning
confidence: 93%
“…In addition, the densest green body was not necessarily obtained by the slurry with the most dispersed particles identified via the slurry evaluation 18–23 . For example, Kim et al 16 investigated aqueous CMP slurry containing silica particles; an apparent viscosity measurement and sedimentation test were conducted, and subsequently, the optimal slurry condition was specified; however, the viscosity of the slurry and the result of sedimentation did not completely correspond, and the reason was not elaborated. Additionally, Davies and Binner 19 studied the dispersant adsorption behavior, particle dispersion state, and green body density obtained from aqueous alumina slurry.…”
Section: Introductionmentioning
confidence: 99%