Influence of Abrasive Particle Movement in Micro USM

Wang, Pei; Yu, Ze; Li, J.; Ma, Chunshi; Xu, Wenji; Wang, X.; Natsu, Wataru

doi:10.1016/j.procir.2013.03.017

Cited by 11 publications

(2 citation statements)

References 11 publications

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“…Abrasive distribution established a close relationship (convex or concave) with machined profile accuracy. 21 Micro-USM was used to generate circular micro holes on quartz using three different abrasives such as B 4 C, SiC, and Al 2 O 3 of the same grit size. It was concluded that Al 2 O 3 abrasive was appropriate for good geometrical accuracy.…”

Section: Introductionmentioning

confidence: 99%

Generation of array of square microcavity on quartz by ultrasonic micromachining process utilizing developed micro tool

Kumar,

Doloi,

Bhattacharyya

2024

Journal of Micromanufacturing

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Quartz possesses distinct characteristics such as exceptional hardness, high brittleness, non-conductivity, remarkable corrosion resistance, efficient transmission within specific wavelengths, strong electrical insulation properties, and the ability to withstand high temperatures and thermal shocks. These extraordinary attributes have led to its component in a wide range of applications, including the fabrication of microelectronic chips, biochips, biological channels, microfluidics, optical lenses, beam-splitting lenses, etc. Ultrasonic micromachining (USMM) is a highly promising technique within the realm of micromachining to create micro features on quartz surfaces. In the present research, array of square micro tools has been designed and developed by the wire-electrical discharge machining (EDM) process. By utilizing the developed array of square micro tools, microcavity arrays have been generated by the USMM process. The influences of process parameters on material removal rate (MRR), width deviation (WD), angular deviation, and taper of square microcavities have been investigated in the present research work. The higher MRR is obtained as 1.427 mm 3 /min at higher abrasive slurry concentration and lower WD of micro cavities is obtained as 37 µm and lower taper angle is 1.109° at 5% abrasive slurry concentration. The lower value of angular deviation is obtained as 0.836° at a lower power rating during the generation of an array of square microcavity on quartz by the USMM process. By employing array of micro tools, the accuracy of micro features can be improved, and also productivity can be increased.

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Section: Introductionmentioning

confidence: 99%

Generation of array of square microcavity on quartz by ultrasonic micromachining process utilizing developed micro tool

Kumar,

Doloi,

Bhattacharyya

2024

Journal of Micromanufacturing

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“…During the electrochemical machining process, the insoluble products in the machining area severely affect the precision of electrochemical machining. In order to improve the update of electrolyte in machining area, researchers have employed techniques such as low-frequency vibration and supersonic vibration to improve the quality of electrochemical machining [ 13 , 14 , 15 , 16 , 17 , 18 ]. During electrochemical machining, the electrolyte is mainly sodium nitrate or sodium chloride.…”

Section: Introductionmentioning

confidence: 99%

Experimental Study on the Influence of Tool Electrode Material on Electrochemical Micromachining of 304 Stainless Steel

Bian

et al. 2021

Materials

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Different cathode materials have different surface chemical components and machining capacities, which may finally result in different machining quality and machining efficiency of workpieces. In this paper, in order to investigate the influence of cathode materials on the electrochemical machining of thin-walled workpiece made of 304 stainless steel, five cylindrical electrodes are used as the target working cathodes of electrochemical machining to conduct experiments and research, including 45# steel, 304 stainless steel, aluminum alloy 6061, brass H62, and tungsten steel YK15. The stray current corrosion, taper, and material removal rate were used as the criteria to evaluate the drilling quality of efficiency of a thin-walled workpiece made of 304 stainless steel. The research results show that from the perspectives of stray current corrosion and taper, aluminum alloy 6061 is an optimal tool cathode, which should be used in the electrochemical machining of thin-walled workpieces made of 304 stainless steel; on the aspect of material removal rate, the 45# steel, 304 stainless steel, and aluminum alloy 6061 present close material removal rates, all of which are higher than that of brass H62 and tungsten steel YK15. Based on comprehensive consideration of both machining quality and machining efficiency, the aluminum alloy 6061 is the best option as the cathode tool in the electrochemical machining of thin-walled workpieces made of 304 stainless steel.

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Beruvides¹

2018

Artificial Cognitive Architecture With Self-Learning and Self-Optimization Capabilities

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Influence of Abrasive Particle Movement in Micro USM

Cited by 11 publications

References 11 publications

Generation of array of square microcavity on quartz by ultrasonic micromachining process utilizing developed micro tool

Generation of array of square microcavity on quartz by ultrasonic micromachining process utilizing developed micro tool

Experimental Study on the Influence of Tool Electrode Material on Electrochemical Micromachining of 304 Stainless Steel

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