Influence of a locally-tailored external feedback control on the overall dynamics of a non-contact AFM model

Settimi, Valeria; Rega, Giuseppe

doi:10.1016/j.ijnonlinmec.2015.05.010

Cited by 12 publications

(4 citation statements)

References 36 publications

(55 reference statements)

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“…Hopf bifurcations [27], synchronization [28][29][30], internal resonances [31][32][33], and veering [34][35][36] are examples of physical phenomena that were extensively investigated at the micro and nano scale. Also, significant research has been conducted recently on nonlinear mechanics of microsystems, such as dynamic integrity of electrostatic MEMS [37][38][39] and AFM [40,41], control of MEMS [42][43][44], reduced-order modeling and gyroscopes [45][46][47].…”

Section: Introductionmentioning

confidence: 99%

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Hajjaj

Jaber

Ilyas

et al. 2020

International Journal of Non-Linear Mechanics

110

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Micro and nanoelectromechanical systems M/NEMS have been extensively investigated and exploited in the past few decades for various applications and for probing fundamental physical phenomena. Understanding the linear and nonlinear dynamical behaviors of the movable structures in these systems is crucial for their successful implementation in various novel technologies and to meet the long list of new sophisticated requirements. This paper presents a review for some of the recent topics pertaining to the dynamical behaviors, linear and nonlinear, of M/NEMS resonating structures. First, an overview is presented of the various used dynamical approaches to enhance the sensitivity of resonators for sensing applications. Then a summary is presented of the recent works on the linear and nonlinear mode coupling in M/NEMS resonator. Next, recent research is reviewed on coupled M/NEMS resonators, mechanically and electrically, leading to collective behaviors like mode localization. The final part of the paper discusses analytical approaches that have been developed to better understand and investigate the dynamical behavior of M/NEMS resonators focusing on the perturbation method the multiple time scales.

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Section: Introductionmentioning

confidence: 99%

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Hajjaj

Jaber

Ilyas

et al. 2020

International Journal of Non-Linear Mechanics

110

View full text Add to dashboard Cite

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“…In order to investigate and verify the overall effects of the control introduction on the system behavior, a comprehensive analysis of its dynamical response is carried out and compared with the results already obtained for the uncontrolled system in Sect. 2.2 (Settimi and Rega, 2016c). For the set of parameters values reported in (7), Figure 16 summarizes the system dynamics under variation of the forcing amplitude U , with identification of the different local bifurcation thresholds.…”

Section: Local Bifurcations and Response Scenariosmentioning

confidence: 99%

Local Versus Global Dynamics and Control of an AFM Model in a Safety Perspective

Settimi

Rega

2018

Global Nonlinear Dynamics for Engineering Design and System Safety

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“…19 Spiitzner et al used phase images to distinguish substances with different mechanical properties of polystyrene blockpolybutadiene with a thickness of 19 nm. 20 TM-AFM was applied for sample measurement, and the frequency near the first resonance peak of probe was usually selected for driving the probe vibration. [21][22][23] In the phase image, when the phase shift is above 90 • , the force between the probe and the sample is mainly attractive, while when the phase shift is below 90 • , the force is mainly repulsive.…”

Section: Introductionmentioning

confidence: 99%

“…Spiitzner et al. used phase images to distinguish substances with different mechanical properties of polystyrene block‐polybutadiene with a thickness of 19 nm 20 . TM‐AFM was applied for sample measurement, and the frequency near the first resonance peak of probe was usually selected for driving the probe vibration 21–23 .…”

Section: Introductionmentioning

confidence: 99%

Subsurface phase imaging of tapping‐mode atomic force microscopy at phase resonance

Sun

Cao

Xie

et al. 2022

Journal of Microscopy

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The phase image of tapping‐mode atomic force microscopy (TM‐AFM) contains energy dissipation, which is related to the sample information on the physical properties such as the sample Young's modulus, adhesion, surface morphology and subsurface morphology. When TM‐AFM is used for sample measurement, the frequency near the first resonance peak of probe is usually selected to drive the probe vibration. When the probe vibration is driven by the frequency, the probe has a high amplitude sensitivity, but the phase sensitivity is relatively low. In this paper, the frequency at the probe phase resonance peak was selected for driving the probe vibration to measure the sample, which improved the image resolution. Phase imaging was performed on three uniform photoresist samples with different thicknesses and the same structure. When the scanning parameters were fixed and the probe setpoint value was changed alone, it was found that with the decrease of setpoint value the horizontal resolution of the phase subsurface image was decreased, and the depth sensitivity was increased first and then decreased. The result shows that TM‐AFM working at the phase resonance peak can better realise the subsurface imaging of samples at different depths. Phase subsurface imaging at the resonance can be used to quantitatively obtain subsurface phase images of different depths.

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Influence of a locally-tailored external feedback control on the overall dynamics of a non-contact AFM model

Cited by 12 publications

References 36 publications

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Linear and nonlinear dynamics of micro and nano-resonators: Review of recent advances

Local Versus Global Dynamics and Control of an AFM Model in a Safety Perspective

Subsurface phase imaging of tapping‐mode atomic force microscopy at phase resonance

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