Thin films of the electron-doped infinite-layer cuprate superconductor Sr1−xLaxCuO2 (SLCO) with doping x ≈ 0.15 were grown by means of pulsed laser deposition. (001)-oriented KTaO3 and SrTiO3 single crystals were used as substrates. In case of SrTiO3, a BaTiO3 thin film was deposited prior to SLCO, acting as buffer layer providing tensile strain to the SLCO film. To induce superconductivity, the as-grown films were annealed under reducing conditions, which will be described in detail. The films were characterized by reflection high-energy electron diffraction, atomic force microscopy, x-ray diffraction, Rutherford backscattering spectroscopy, and electric transport measurements at temperatures down to T = 4.2 K. We discuss in detail the influence of different process parameters on the final film properties.