Infiltration &amp; Epitaxial Growth Gradient Transition Siox Films Prepared on Polyimide Surface by Photoactivation/Photopolymerization Method

Liu, Hao; Li, Chundong; Yuan, Qunbo; Neshchimenko, V.V.; Xu, Baocai

doi:10.2139/ssrn.4606365

2023

DOI: 10.2139/ssrn.4606365

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Infiltration & Epitaxial Growth Gradient Transition Siox Films Prepared on Polyimide Surface by Photoactivation/Photopolymerization Method

Hao Liu,

Chundong Li,

Qunbo Yuan

et al.

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Infiltration & Epitaxial Growth Gradient Transition Siox Films Prepared on Polyimide Surface by Photoactivation/Photopolymerization Method

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References 22 publications

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