Inexpensive Home-Made Single Wavelength Ellipsometer (<i>λ</i>= 633 nm) for Measuring the Optical Constant of Nanostructured Materials

Maulana, Lucky Zaehir; Megasari, Kiki; Suharyadi, Edi; Anugraha, Rinto; Abraha, Kamsul; Santoso, Iman

doi:10.1088/1757-899x/202/1/012031

Cited by 6 publications

(5 citation statements)

References 7 publications

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“…Reflections occur at each interface within the sample at a given amplitude and phase. These reflections are analyzed and detected and can determine specific properties of each layer of the sample, whether it is to evaluate coating thickness, coating uniformity, surface roughness or even to determine the optical constants for the coating structure [ 89 , 90 ]. There are several variants of ellipsometry and its optical setup, such as using spectroscopic or singular wavelength light sources [ 91 , 92 ], using numerous passive optical components setups [ 93 , 94 ] and using imaging techniques [ 1 ].…”

Section: Potential In-line Coating Thickness Test Methodsmentioning

confidence: 99%

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

Jones

Uggalla

et al. 2021

Sensors

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Coatings or films are applied to a substrate for several applications, such as waterproofing, corrosion resistance, adhesion performance, cosmetic effects, and optical coatings. When applying a coating to a substrate, it is vital to monitor the coating thickness during the coating process to achieve a product to the desired specification via real time production control. There are several different coating thickness measurement methods that can be used, either in-line or off-line, which can determine the coating thickness relative to the material of the coating and the substrate. In-line coating thickness measurement methods are often very difficult to design and implement due to the nature of the harsh environmental conditions of typical production processes and the speed at which the process is run. This paper addresses the current and novel coating thickness methodologies for application to chromium coatings on a ferro-magnetic steel substrate with their advantages and limitations regarding in-line measurement. The most common in-line coating thickness measurement method utilized within the steel packaging industry is the X-ray Fluorescence (XRF) method, but these systems can become costly when implemented for a wide packaging product and pose health and safety concerns due to its ionizing radiation. As technology advances, nanometer-scale coatings are becoming more common, and here three methods are highlighted, which have been used extensively in other industries (with several variants in their design) which can potentially measure coatings of nanometer thickness in a production line, precisely, safely, and do so in a non-contact and non-destructive manner. These methods are optical reflectometry, ellipsometry and interferometry.

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Section: Potential In-line Coating Thickness Test Methodsmentioning

confidence: 99%

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

Jones

Uggalla

et al. 2021

Sensors

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“…For epi -ITO thin films, we measured up to 800 °C under vacuum ( p (O 2 ) < 1.0 × 10 –6 Torr) and oxygen ( p (O 2 ) = 10 mTorr) environments. We extracted the complex refractive index, , where n and k are the refractive index and the extinction coefficient, respectively, from the measured spectroscopic ellipsometry parameters, Ψ and Δ, which are the amplitude ratio and phase difference 31 , using numerical interaction process based on the Fresnel equation 32 . (See the Supplementary material for details.)…”

Section: Methodsmentioning

confidence: 99%

High-temperature optical properties of indium tin oxide thin-films

Kim

Shrestha

Souri

et al. 2020

Sci Rep

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Indium tin oxide (ITO) is one of the most widely used transparent conductors in optoelectronic device applications. We investigated the optical properties of ITO thin films at high temperatures up to 800 °C using spectroscopic ellipsometry. As temperature increases, amorphous ITO thin films undergo a phase transition at ~ 200 °C and develop polycrystalline phases with increased optical gap energies. The optical gap energies of both polycrystalline and epitaxial ITO thin films decrease with increasing temperature due to electron-phonon interactions. Depending on the background oxygen partial pressure, however, we observed that the optical gap energies exhibit reversible changes, implying that the oxidation and reduction processes occur vigorously due to the low oxidation and reduction potential energies of the ITO thin films at high temperatures. This result suggests that the electronic structure of ITO thin films strongly depends on temperature and oxygen partial pressure while they remain optically transparent, i.e., optical gap energies > 3.6 eV.

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“…The construction of ellipsometer has been done several times, such as Hassani et al (2017) [7] designing ellipsometer using single wavelength for the thin film characterization of silica, magnesium Florida and sulfide. Maulana (2017) [8] succeeded in sensing the thickness of Cr using an inexpensive single wavelength homemade ellipsometer. For a more comprehensive optical study, a multi-wavelength ellipsometer is required, in addition to the optical properties depend on wavelength material requires optical study over a wide wavelength range.…”

Section: Introductionmentioning

confidence: 99%

Simple and Low-Cost Rotating Analyzer Ellipsometer (RAE) for Wavelength Dependent Optical Constant Characterization of Novel Materials

Herawati

Khasanah

Maulana

et al. 2020

KEM

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Simple and low-cost homemade Rotating Analyzer Ellipsometer (RAE) configuration has been developed. Ellipsometer measures the changes of the reflected light polarization of the sample, yielding to the ratio of amplitude (ψ) and phase difference (Δ) between p- and s-polarization. Based on the ψ and Δ values, the dielectric constant of the sample can be extracted. However, the available manufacturer-made ellipsometer is quite expensive and is not a good choice for the student to learn the optical concept since the complexity of its structure could hide the simple optical concept during the measurement. In this work, we have built RAE that constituted of relatively simple components and low-cost as well as simple configuration. Here, we also show the principle of measurement and the ellipsometry data analysis using the optical model related to the system under study Drude-Lorentz model. The calibration of our SE has been done by measuring standard materials in the energy range of 1.5 to 3.3 eV and it was compared to the reference measurement using standard ellipsometer. The result is surprisingly accurate within the error of 5%. This research can be used for studying the several important optical concepts as well as for investigating nanostructured materials.

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Inexpensive Home-Made Single Wavelength Ellipsometer (λ= 633 nm) for Measuring the Optical Constant of Nanostructured Materials

Cited by 6 publications

References 7 publications

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

Continuous In-Line Chromium Coating Thickness Measurement Methodologies: An Investigation of Current and Potential Technology

High-temperature optical properties of indium tin oxide thin-films

Simple and Low-Cost Rotating Analyzer Ellipsometer (RAE) for Wavelength Dependent Optical Constant Characterization of Novel Materials

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