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2011
DOI: 10.1017/cbo9780511933899
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Inertial MEMS

Abstract: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and arch… Show more

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Cited by 118 publications
(28 citation statements)
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“…The corresponding boundary conditions are given as: at·y=0,duoutdy=0 at·y=false(hdfalse),|uiny=(hd)+=|uouty=(hd) at·y=false(hdfalse),|duindyy=(hd)+=|duoutdyy=(hd)Knudsen number (Kn), defined as the ratio of molecular mean free path (λD) and system characteristic length ( L ), is important for liquid transport in nanochannels as magnitude of Kn provides an idea of the validity of continuum assumption. For magnitude of Kn<0.01, continuum assumption of fluid flow is valid, whereas for 0.01<Kn<0.1, slip boundary condition should be incorporated to use the continuum approach . Since, nanofluidic channels may involve Kn0.01, slip boundary condition at the wall has been considered in this study as given below: at·y=h...…”
Section: Theorymentioning
confidence: 99%
“…The corresponding boundary conditions are given as: at·y=0,duoutdy=0 at·y=false(hdfalse),|uiny=(hd)+=|uouty=(hd) at·y=false(hdfalse),|duindyy=(hd)+=|duoutdyy=(hd)Knudsen number (Kn), defined as the ratio of molecular mean free path (λD) and system characteristic length ( L ), is important for liquid transport in nanochannels as magnitude of Kn provides an idea of the validity of continuum assumption. For magnitude of Kn<0.01, continuum assumption of fluid flow is valid, whereas for 0.01<Kn<0.1, slip boundary condition should be incorporated to use the continuum approach . Since, nanofluidic channels may involve Kn0.01, slip boundary condition at the wall has been considered in this study as given below: at·y=h...…”
Section: Theorymentioning
confidence: 99%
“…The electrostatic force F d alon by g the direction d is given the negative gradient of the stored energy [1] as…”
Section: Mapping From a Physical Plane To A Parallel Stripmentioning
confidence: 99%
“…MEMS technology has been rapidly developed and expanded in the past 30 years in various industries such as automobile, consumer electronic, health, and telecommunication. In 2011, MEMS market reached $12B [1], with MEMS capacitive sensors comprising significant portion of the market. For example, capacitive MEMS are the enabling technology in automobile airbags, accelerometers for cell phones and video game controllers, affordable inertial navigation, etc.…”
Section: Introductionmentioning
confidence: 99%
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“…Sensors are compared with each other on the basis of certain performance factors, such as bias and scale factor stability and repeatability or noise (e.g. random walk) [158,159]. One of the main determining factors in choosing sensors is often the budget of the project.…”
mentioning
confidence: 99%