Abstract-In this paper, we present two nondestructive characterization methods for the detection of voids in rear local contacts of passivated emitter and rear-type solar cells, namely scanning acoustic microscopy and computer tomography. We compare both methods and include a comparison with electroluminescence measurements. It is shown in this paper that voids can easily be detected with both measurement types without any sample preparation. We found a good match of scanning acoustic microscopy (SAM) and computer tomography (CT), which is presented for this purpose for the first time. The investigation was carried out for different aluminum pastes.Index Terms-Computer tomography (CT), crystalline silicon, passivated emitter and rear cell concept (PERC), scanning acoustic microscopy (SAM), solar cells, voids.