2011
DOI: 10.1142/7745
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Industrial Accelerators and Their Applications

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Cited by 81 publications
(41 citation statements)
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“…Industrial use of accelerators is the most dominant application [Hamm and Hamm, 2012;Hamm, 2013;Mehta, 2000). The semiconductor industry uses ion implantation facility in a big way.…”
Section: A C C E P T E D V E R S I O Nmentioning
confidence: 99%
See 1 more Smart Citation
“…Industrial use of accelerators is the most dominant application [Hamm and Hamm, 2012;Hamm, 2013;Mehta, 2000). The semiconductor industry uses ion implantation facility in a big way.…”
Section: A C C E P T E D V E R S I O Nmentioning
confidence: 99%
“…Presently, this number, including both the ion and the electron types, both big and small, exceeds 30,000 (Accelerator for society, 2018; Hamm and Hamm, 2012;Hamm, 2013;PTCOG,2018). More than 60% of these are for industrial use.…”
Section: Introductionmentioning
confidence: 99%
“…• instrumentación y métodos experimentales [Br08], [Gr83], [He84], [Kr06], [Ro89] • desarrollos industriales [Ha08], [Ha12].…”
Section: Aplicacionesunclassified
“…In the past years, nanostructures have attracted intense research interest due to their new properties not seen in bulk counterparts [1][2][3]. Ion irradiation is a powerful tool to tune the properties of materials [4][5][6][7] for a wide range of applications [8][9][10][11][12]. In many cases, ion implantation is also the method of choice for doping nanostructures, since this method is not constrained by thermal equilibrium [4,13,14].…”
Section: Introductionmentioning
confidence: 99%