“…At the electrode surface, reflection and loss of radicals, CH, CH 2 , CH 3 , C 2 H 5 , and H are assumed, and their sticking coefficients are 0.025, 0.025, 0.01, 0.01, and 0.01, respectively. 10 The input parameter of this model, the electron drift velocity W e , and the rate coefficients k of electron-CH 4 reactions were obtained from a Boltzmann equation analysis using a set of the electron collision cross sections of CH 4 . 22 The reaction rate coefficients k for H 2 , CH 2 , CH 3 , C 2 H 2 , C 2 H 4 , C 2 H 5 , C 2 H 6 were estimated from their reaction cross sections.…”