Inductance and Q‐Factor of Micromagnetic Inductor Are Enhanced by FeCoB Films with Self‐Bias
Chao Sun,
Dalong Qiu,
Peng Li
et al.
Abstract:As technology progresses, the operational frequencies of electronic devices have migrated into the GHz range. As an important electronic device, the compatibility of the preparation process of inductors with integrated circuits also needs to be improved. Currently, most commercial inductors are constructed from ferrite materials, making them challenging to integrate with integrated circuits. Herein, FeCoB films with a self‐biased ferromagnetic frequency up to 21 GHz are deposited on Si substrates using the com… Show more
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