Indium tin oxide obtained by high pressure sputtering for emerging selective contacts in photovoltaic cells

Caudevilla, D.; García-Hemme, E.; Andrés, E. San; Pérez‐Zenteno, Francisco; Torres, I.; Barrio, R.; García-Hernansanz, R.; Algaidy, Sari; Olea, J.; Pastor, David; Prado, A. del

doi:10.1016/j.mssp.2021.106189

Cited by 7 publications

(2 citation statements)

References 67 publications

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“…Table summarizes the performance of the best electrochemically grown Ag NW grid ( w = 99 nm, L = 4 μm, h = 345 nm) and those for other similar Ag nanowire TEs, as well as for 80 nm thick ITO, which is used as industrial standard. ,,, From the table, one can clearly see how the electrochemically grown Ag NW grid largely outperforms all other nanoscale approaches. This result was obtained for the most sparse grid with the largest aspect ratio.…”

Section: Resultsmentioning

confidence: 99%

High Aspect Ratio Silver Nanogrids by Bottom-Up Electrochemical Growth as Transparent Electrode

Bleiji,

Cordaro,

Tabernig

et al. 2024

ACS Appl. Opt. Mater.

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A scalable selective-area electrochemical method is reported for the fabrication of interconnected metal nanostructures. In this work, the fabrication of silver nanowire grids for the application of transparent electrodes is explored. The presented method is based on a through-the-mask electrodeposition method, where the mask is made by using substrate conformal imprint lithography. We find that the nucleation density of the silver nanoparticles is the key parameter for successful homogeneous void-free filling of the template. We independently controlled the density of the silver nuclei and their growth by using a double potential pulse. The silver nanowire grids show high transmission (95.9%) and low sheet resistance (as low as 3.7 Ω/sq), resulting in a superior figure of merit (FoM). Due to the bottom-up nature of this technique, arbitrarily high aspect ratio nanowires can be achieved, therefore decreasing the sheet resistance without affecting transmittance and carrier collection. The presented method can be generalized to the large-area nanofabrication of any well-defined nanostructure design of any metal transparent electrode for multiple applications.

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Section: Resultsmentioning

confidence: 99%

High Aspect Ratio Silver Nanogrids by Bottom-Up Electrochemical Growth as Transparent Electrode

Bleiji,

Cordaro,

Tabernig

et al. 2024

ACS Appl. Opt. Mater.

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“…They have highlighted that the primary source of these high-energy particles consists of sputtered negative ions (such as O − , , InO − , etc.). These ions are accelerated by the cathode sheath, carrying an energy level closely matching the target voltage, typically in the range of hundreds of electron volts (eV) [13,14]. Furthermore, various efforts have been made to mitigate sputtering damages.…”

Section: Introductionmentioning

confidence: 99%

Effects of power on ion behaviors in radio-frequency magnetron sputtering of indium tin oxide (ITO)

李,

MO 莫,

CHEN 陈

et al. 2024

Plasma Sci. Technol.

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This study delves into ion behavior at the substrate position within RF magnetron discharges utilizing an indium tin oxide (ITO) target. The positive ion energies exhibit an upward trajectory with increasing RF power, attributed to heightened plasma potential and initial emergent energy. Simultaneously, the positive ion flux escalates owing to amplified sputtering rates and electron density. Conversely, negative ions exhibit broad ion energy distribution functions (IEDFs) characterized by multiple peaks. These patterns are clarified by a combination of radiofrequency oscillation of cathode voltage and plasma potential, alongside ion transport time. This elucidation finds validation in a one-dimensional model encompassing the initial ion energy. At higher RF power, negative ions surpassing 100 eV escalate in both flux and energy, posing a potential risk of sputtering damages to ITO layers.

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Influence of hydrogen doping of In2O3-based transparent conducting oxide films on silicon heterojunction solar cells

Park,

Hussain,

Park

et al. 2024

J Mater Sci

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Indium tin oxide obtained by high pressure sputtering for emerging selective contacts in photovoltaic cells

Cited by 7 publications

References 67 publications

High Aspect Ratio Silver Nanogrids by Bottom-Up Electrochemical Growth as Transparent Electrode

High Aspect Ratio Silver Nanogrids by Bottom-Up Electrochemical Growth as Transparent Electrode

Effects of power on ion behaviors in radio-frequency magnetron sputtering of indium tin oxide (ITO)

Influence of hydrogen doping of In2O3-based transparent conducting oxide films on silicon heterojunction solar cells

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