2020
DOI: 10.1109/jeds.2020.3017392
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Indium Silicon Oxide TFT Fully Photolithographically Processed for Circuit Integration

Abstract: A new class of amorphous oxide semiconductors based on InOx doped with Ti, W or Si seems to show great promise for large area, flexible, electronics. Of particular interest is the In2O3:SiO2 system as it has a relatively large bond dissociation energy, hence highly suited for long-term environmental stability. In this paper, we present a sub-200°C fully photolithographically-processed indium oxide thin film transistor that is fully compatible to circuit integration on plastic substrates. The TFTs typically sho… Show more

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Cited by 5 publications
(1 citation statement)
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“…As the representative semiconductor material of metal oxide, amorphous indium-gallium-zinc oxide (a-IGZO) is widely used in circuit driver of active-matrix display and peripheral logic units due to their high mobility, excellent stability, mechanical flexibility and large area processability [5][6][7][8] . However, due to the inaccessible low valence band edge [4] , most metal oxide materials in nature show n-type semiconductor characteristic, which greatly limits their applications in logic circuits [9,10] . Contrary to metal oxide materials, most organic materials exhibit semiconductor characteristics of intrinsic p-type, and have the advantages of flexibility, ease of synthesis, low processing temperature and a wide range of varieties [11][12][13][14] .…”
Section: Introductionmentioning
confidence: 99%
“…As the representative semiconductor material of metal oxide, amorphous indium-gallium-zinc oxide (a-IGZO) is widely used in circuit driver of active-matrix display and peripheral logic units due to their high mobility, excellent stability, mechanical flexibility and large area processability [5][6][7][8] . However, due to the inaccessible low valence band edge [4] , most metal oxide materials in nature show n-type semiconductor characteristic, which greatly limits their applications in logic circuits [9,10] . Contrary to metal oxide materials, most organic materials exhibit semiconductor characteristics of intrinsic p-type, and have the advantages of flexibility, ease of synthesis, low processing temperature and a wide range of varieties [11][12][13][14] .…”
Section: Introductionmentioning
confidence: 99%