Indium Phosphide Membrane Nanophotonic Integrated Circuits on Silicon

Jiao, Yuqing; Tol, J.J.G.M. van der; Pogoretskii, Vadim; Engelen, Jorn van; Kashi, Amir Abbas; Reniers, Sander; Wang, Yi; Zhao, Xinran; Yao, Weiming; Liu, Tianran; Pagliano, Francesco; Fiore, Andrea; Zhang, Xuebing; Kumar, Rakesh Ranjan; Tsang, Hon Ki; Veldhoven, René van; Vries, T. de; Geluk, E.J.; Bolk, Jeroen; Ambrosius, H.P.M.M.; Smit, M.K.; Williams, Kevin

doi:10.1002/pssa.201900606

“…The MZI structures are patterned using electron beam lithography (EBL). Fabrication was done on an InP membrane bonded to a silicon substrate (IMOS) with BCB polymer [7,8]. The thickness of the InP membrane is 300 nm.…”

Section: Fabricationmentioning

confidence: 99%

“…It is not feasible to utilize traditional substrate based InP [6] to fabricate slot waveguide modulators because of the weak optical confinement. On the contrary, the InP membrane on Silicon (IMOS) [7,8] is a versatile platform to realize a slot waveguide modulator. The high refractive index contrast in the IMOS platform leads to high mode confinement and reduced dimensions of components.…”

Section: Introductionmentioning

confidence: 99%

Electro-Optic Slot Waveguide Phase Modulator on the InP Membrane on Silicon Platform

Kashi

¹

,

Tol

²

,

Williams

³

et al. 2020

IEEE J. Quantum Electron.

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DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:

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“…The active-passive integration scheme is shown in Fig. 2 [7]. A 300 nm thin InP membrane acts as the passive waveguiding layer.…”

Section: Inp Membrane Nanophotonicsmentioning

confidence: 99%

“…Based on the successful demonstration of a membrane twin-guide amplifier [9], various laser circuits can be built by combining the amplifier building block with passive reflectors and filters. Recent demonstrations include distributed feedback (DFB) lasers with 10 mW output to waveguide and over 60 dB side mode suppression ratio (SMSR) and microring-based tunable lasers with tuning range of 25 nm [7].…”

Section: Inp Membrane Nanophotonicsmentioning

confidence: 99%

See 1 more Smart Citation

InP membrane technology for photonics electronics convergence

Jiao

¹

,

Tol

²

,

Williams

³

2020

2020 Opto-Electronics and Communications Conference (OECC)

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0

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DOI to the publisher's website.• The final author version and the galley proof are versions of the publication after peer review.• The final published version features the final layout of the paper including the volume, issue and page numbers. Link to publication General rightsCopyright and moral rights for the publications made accessible in the public portal are retained by the authors and/or other copyright owners and it is a condition of accessing publications that users recognise and abide by the legal requirements associated with these rights.• Users may download and print one copy of any publication from the public portal for the purpose of private study or research. • You may not further distribute the material or use it for any profit-making activity or commercial gain • You may freely distribute the URL identifying the publication in the public portal.If the publication is distributed under the terms of Article 25fa of the Dutch Copyright Act, indicated by the "Taverne" license above, please follow below link for the End User Agreement:

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