Incubation effect and its influence on laser patterning of ITO thin film

Xiao, Shuzhang; Gurevich, Evgeny L.; Ostendorf, Andreas

doi:10.1007/s00339-012-6820-y

Cited by 34 publications

(11 citation statements)

References 43 publications

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“…The hole diameter visibly increases when the number of pulses is increased, suggesting the presence of damage accumulation. The phenomenon was first reported by Jee et al [23], followed by extensive application to the ablation of various materials, including TiN [24][25][26], using ultrashort ps-fs pulses. The damage accumulation effect is expressed as a reduction in the threshold fluence as:…”

Section: Multiple-pulse Studymentioning

confidence: 95%

“…The damage accumulation observed on the processing of polymeric materials (PMMA) with UV light was attributed to the photoinduced formation of defect centres, which enhanced the absorption of UV light (τ = 20 ns, λ = 248 nm PRR = 2 Hz) [25]. More recently, damage accumulation during the laser micromachining of ITO semiconductors was attributed to the accumulation of plastic deformation (τ = 10 ps, λ = 1064 nm PRR = 200-1000 kHz) [26]. In this study, the damage accumulation observed on TiN fits better with the increase in absorption due to changes in surface topography, as can be observed from the SEM images.…”

Section: Multiple-pulse Studymentioning

confidence: 98%

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Laser micromachining of TiN coatings with variable pulse durations and shapes in ns regime

Demir

Pangovski

O’Neill

et al. 2014

Surface and Coatings Technology

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Section: Multiple-pulse Studymentioning

confidence: 95%

Section: Multiple-pulse Studymentioning

confidence: 98%

Laser micromachining of TiN coatings with variable pulse durations and shapes in ns regime

Demir

Pangovski

O’Neill

et al. 2014

Surface and Coatings Technology

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Section: Resultsmentioning

confidence: 99%

“…[16][17][18] This interesting phenomenon, referred in the literature as incubation effect, can be explained by the changes in absorption of the incident laser radiation caused by the creation of radiation-induced defects on the surface of the irradiated material. [16][17][18] The enhanced absorption leads to surface melting with the further increase in the number of subsequent laser pulses. In fact, single pulse melting threshold of ZnO nanoparticles submitted to UV KrF* excimer laser irradiation (248 nm wavelength and 20 ns pulse width) 19 or to UV ArF* excimer laser irradiation (193 nm wavelength and 15 nm pulse width) 20 was reported to be around 130 mJ/cm 2 , corresponding to 6.5 MW/cm 2 or 8.6 MW/cm 2 pulse intensity, respectively, well above our lowest, 10 mJ/cm 2 , fluence value equivalent to 2.5 MW/cm 2 .…”

Section: Resultsmentioning

confidence: 99%

Effect of nitrogen doping on wetting and photoactive properties of laser processed zinc oxide-graphene oxide nanocomposite layers

György

Pino

Logofatu

et al. 2014

Journal of Applied Physics

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Zinc oxide-graphene oxide nanocomposite layers were submitted to laser irradiation in air or controlled nitrogen atmosphere using a frequency quadrupled Nd:YAG (λ = 266 nm, τFWHM ≅ 3 ns, ν = 10 Hz) laser source. The experiments were performed in air at atmospheric pressure or in nitrogen at a pressure of 2 × 104 Pa. The effect of the irradiation conditions, incident laser fluence value, and number of subsequent laser pulses on the surface morphology of the composite material was systematically investigated. The obtained results reveal that nitrogen incorporation improves significantly the wetting and photoactive properties of the laser processed layers. The kinetics of water contact angle variation when the samples are submitted to laser irradiation in nitrogen are faster than that of the samples irradiated in air, the surfaces becoming super-hydrophilic under UV light irradiation.

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“…This can be attributed to the so-called "incubation effect" that takes place during multi-pulses laser ablation as well as the different surface conditions on the actual samples [76].…”

Section: Temperature and Vapour Pressurementioning

confidence: 99%

Smoothed Particle Hydrodynamics (SPH) modelling of transient heat transfer in pulsed laser ablation of Al and associated free-surface problems

Alshaer

Rogers

2017

Computational Materials Science

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A smoothed particle hydrodynamics (SPH) numerical model is developed to simulate pulsed-laser ablation processes for micro-machining. Heat diffusion behaviour of a specimen under the action of nanosecond pulsed lasers can be described analytically by using complementary error function solutions of second-order differential equations. However, their application is limited to cases without loss of material at the surface. Compared to conventional mesh-based techniques, as a novel meshless simulation method, SPH is ideally suited to applications with highly nonlinear and explosive behaviour in laser ablation. However, little is known about the suitability of using SPH for the modelling of laser-material interactions with multiple phases at the micro scale. The present work investigates SPH modelling of pulsed-laser ablation of aluminium where the laser is applied directly to the free-surface boundary of the specimen. Having first assessed the performance of standard SPH surface treatments for functions commonly used to describe laser heating, the heat conduction behaviour of a new SPH methodology is then evaluated through a number of test cases for single-and multiple-pulse laser heating of aluminium showing excellent agreement when compared with an analytical solution. Simulation of real ablation processes, however, requires the model to capture the removal of material from the surface and its subsequent effects on the laser heating process. Hence, the SPH model for describing the transient behaviour of nanosecond laser ablation is validated with a number of experimental and reference results reported in the literature. The SPH model successfully predicts the material ablation depth profiles over a wide range of laser fluences 4-23 J/cm 2 and pulse durations 6-10 ns, and also predicts the transient behaviour of the ejected material during the laser ablation process. Unlike conventional mesh-based methods, the SPH model was not only able to provide the thermo-physical properties of the ejected particles, but also the effect of the interaction between them as well as the direction and the pattern of the ejection.2

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Incubation effect and its influence on laser patterning of ITO thin film

Cited by 34 publications

References 43 publications

Laser micromachining of TiN coatings with variable pulse durations and shapes in ns regime

Laser micromachining of TiN coatings with variable pulse durations and shapes in ns regime

Effect of nitrogen doping on wetting and photoactive properties of laser processed zinc oxide-graphene oxide nanocomposite layers

Smoothed Particle Hydrodynamics (SPH) modelling of transient heat transfer in pulsed laser ablation of Al and associated free-surface problems

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