2012 IEEE Sensors 2012
DOI: 10.1109/icsens.2012.6411463
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Increasing the sensitivity and selectivity of Metal Oxide gas sensors by controlling the sensitive layer polarization

Abstract: The effects of bias current on sensitivity and selectivity of resistive Metal-Oxide (MOX) sensors toward gases have been investigated. While the working temperature is kept constant, it has been found that tuning the polarization of the MOX thin film induces changes on its sensitivity toward gases. Besides, the behavior of sensitivity versus bias current depends on the nature of the gas and of the thin sensing film, meaning it is possible to enhance the selectivity by adjusting the polarization of different se… Show more

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Cited by 9 publications
(5 citation statements)
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“…The analytical signal can also be defined as the absolute difference between the resistance of the sensing element under the reference medium (air) and under the target gas to the resistance under the air (Ahlers et al, 2005;Dufour et al, 2012):…”
Section: Semiconductor Metal Oxide As Gas Sensing Materialsmentioning
confidence: 99%
“…The analytical signal can also be defined as the absolute difference between the resistance of the sensing element under the reference medium (air) and under the target gas to the resistance under the air (Ahlers et al, 2005;Dufour et al, 2012):…”
Section: Semiconductor Metal Oxide As Gas Sensing Materialsmentioning
confidence: 99%
“…The second term is proportional to the velocity of the beam and accounts for the viscous drag force exerted by the fluid on the moving cantilever. These two components can therefore be described as an added mass, m A , and an added damping coefficient, c A [34,35]:…”
Section: Dynamical Numerical Model: Hydrodynamic Forcementioning
confidence: 99%
“…The parameter δ (ω) = 2η ρω is the thickness of the layer of fluid that surrounds the beam, which depends on the fluid viscosity, η, the fluid density, ρ, and on the angular frequency of oscillation, ω. L and W represent the length and width of the cantilever, respectively [35].…”
Section: Dynamical Numerical Model: Hydrodynamic Forcementioning
confidence: 99%
“…Temperature and humidity sensors were integrated in the chamber to monitor and stabilize the measurement conditions because the temperature and moisture disturb the conductance of MOX gas sensors [44]. The chamber temperature was modulated by the heating voltage supplied to the heaters of sensors, and the heating voltage was controlled by a PID controller taking chamber temperature as the feedback.…”
Section: Table I Mox Gas Sensors Used In the E-nose Systemmentioning
confidence: 99%