3rd IEEE International Conference on Group IV Photonics, 2006. 2006
DOI: 10.1109/group4.2006.1708212
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Incorporation of a Photonic Layer at the Metallizations Levels of a CMOS Circuit

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Cited by 25 publications
(15 citation statements)
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“…Finally, a-Si:H is deposited at low temperature and is compatible with standard CMOS technology. a-Si:H based photonics can be considered as an alternative technology to SOI for integrating photonic functions on CMOS [29][30][31][32][33]. Our results raise the prospect for a-Si:H to provide a truly practical and viable, high performance, platform for nonlinear photonic applications in the telecommunications wavelength window.…”
Section: Resultsmentioning
confidence: 85%
“…Finally, a-Si:H is deposited at low temperature and is compatible with standard CMOS technology. a-Si:H based photonics can be considered as an alternative technology to SOI for integrating photonic functions on CMOS [29][30][31][32][33]. Our results raise the prospect for a-Si:H to provide a truly practical and viable, high performance, platform for nonlinear photonic applications in the telecommunications wavelength window.…”
Section: Resultsmentioning
confidence: 85%
“…Amorphous silicon, studied as a nonlinear material [117] and platform for linear photonics [118,119] for some time, was recently proposed [120] as an alternative to SOI for nonlinear optics in the telecom band. Although initial measurements yielded a FOM no better than c-Si (~0.5) [120,121], more recent results have shown FOMs ranging from 1 [122] to as high as 2 [123,124], allowing very high parametric gain (+26dB) over the C-band [125].…”
Section: Future Challenges Opportunitiesmentioning
confidence: 99%
“…While amorphous silicon has been studied as a nonlinear material for some time [55], and developed as a platform for linear photonics in the telecom band for a number of years [56,57], only recently has it been proposed [58] as an alternative to SOI for nonlinear optics in the telecom band, with the hope that a-Si could possibly offer lower TPA than silicon. Table 2.2 surveys the measured nonlinear properties for a-Si, which show a near universal improvement in both the nonlinearity and FOM over c-Si.…”
Section: Platformsmentioning
confidence: 99%