“…Therefore, a low-cost and high-fidelity fabrication method for generating nanostructures on titanium is highly desirable, and plasma etching is a possible answer to this problem. RIE has been shown to be capable of generating erect arrays of vertical nanopillars, similar to those found on the wings of cicadas and dragonflies, and NSSs spanning several cm 2 can be produced rapidly. ,,, However, studies on such nanotopographies on titanium, despite its widespread use as biomaterial, are currently scarce, and they often report on only one recipe, provide few details of the fabrication process, and focus almost exclusively on antibacterial activity and biocompatibility. ,,, Table S1 compiles a list of patterned etching studies of titanium, performed using various gases. Studies of chlorine-based maskless etching of titanium and further exploration for biomedical and other applications are listed in Table S2.…”