2018
DOI: 10.1007/s40145-018-0265-5
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Incipient low-temperature formation of MAX phase in Cr–Al–C films

Abstract: Ceramic-metallic MAX phase of chromium aluminium carbide ternary compounds was successfully obtained through deposition by DC sputtering onto Si substrates. A study of the influence of substrate temperature and in-air post-annealing on the film crystallinity and oxidation was undertaken. Scanning electron microscopy (SEM), wavelength-dispersive X-ray analysis (WDSX), and X-ray diffraction (XRD) were used for film characterization. It is shown that, at substrate temperature of about 450 ℃, as-deposited films ar… Show more

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Cited by 12 publications
(8 citation statements)
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“…In this study, the column-free and denser microstructure of Cr 2 AlC MAX phase coatings deposited by HiPIMS is exclusively different from the structures reported previously [ 28 , 32 , 55 , 56 , 57 , 58 ]. The improved microstructure of the Cr 2 AlC MAX phase coatings is responsible for enhanced hardness and modulus (discussed later).…”
Section: Resultscontrasting
confidence: 80%
“…In this study, the column-free and denser microstructure of Cr 2 AlC MAX phase coatings deposited by HiPIMS is exclusively different from the structures reported previously [ 28 , 32 , 55 , 56 , 57 , 58 ]. The improved microstructure of the Cr 2 AlC MAX phase coatings is responsible for enhanced hardness and modulus (discussed later).…”
Section: Resultscontrasting
confidence: 80%
“…To date, many MAX phase thin films have been synthesized, particularly in the Ti-Si-C [8][9][10], Ti-Al-N [11][12][13][14], Ti-Al-C [15][16][17], Ti-Ge-C [18], Cr-Al-C [19,20], V-Al-C [21], and Nb-Al-C [22] systems; however, there have been few reports on the preparation of the Nb-Si-C system. Researchers have prepared Nb-Si-C thin films by magnetron sputtering from individual Nb, Si, and C targets and obtained a mixture of NbC, SiC, and NbSi phases.…”
Section: Introductionmentioning
confidence: 99%
“…The content of the second phase affected the microhardness and resistance of Ti 3 SiC 2 , and the higher the content was, the greater the microhardness was. Crisan and Crisan [23] deposited Cr-Al-C ternary MAX phase compound films on Si substrate by DC sputtering. The effects of substrate temperature and annealing in air on the crystallinity and oxidation of the films were investigated.…”
Section: Introductionmentioning
confidence: 99%