ZnO and ZnO:Sb films were deposited using low pressure metal organic chemical vapor deposition on C-and R-oriented sapphire and O-polar ZnO substrates. Surface morphologies were studied using scanning electron microscopy. Whereas ZnO films grown on C-sapphire show a rough surface and hexagonal rods, the doped ZnO:Sb layers exhibit a relatively smoother surface, indicating a possible surfactant effect of antimony. The secondary ion mass spectrometry measurements permit to determine the antimony profile in the doped layers. Sb concentrations from 10 18 to 10 20 at/cm 3 were measured, depending on the growth conditions and substrate nature. Photoluminescence spectra exhibit donor-acceptor pair emission at 3.22 eV.