In-situ X-ray tomographic imaging and controlled steering of microcracks in 3D nanopatterned structures

Kutukova, Kristina; Gluch, Jürgen; Kraatz, Matthias; Clausner, André; Zschech, Ehrenfried

doi:10.1016/j.matdes.2022.110946

Cited by 5 publications

(2 citation statements)

References 17 publications

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“…X-ray microscopy is a unique technique to image buried nanostructures and defects like voids nondestructively. The high-resolution X-ray imaging of on-chip interconnects in microchips as well as of metal through-silicon via structures and microbumps for 3D chip integration was demonstrated [ 25 , 26 ]; however, the silicon chips had to be thinned to about 50 μm because of the limited transparency of the silicon for 8 keV photons used in state-of-the-art laboratory X-ray microscopes.…”

Section: Laboratory Hard X-ray Microscopy—application For Microelectr...mentioning

confidence: 99%

Laboratory X-ray Microscopy of 3D Nanostructures in the Hard X-ray Regime Enabled by a Combination of Multilayer X-ray Optics

Lechowski,

Kutukova,

Grenzer

et al. 2024

Nanomaterials

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High-resolution imaging of buried metal interconnect structures in advanced microelectronic products with full-field X-ray microscopy is demonstrated in the hard X-ray regime, i.e., at photon energies > 10 keV. The combination of two multilayer optics—a side-by-side Montel (or nested Kirkpatrick–Baez) condenser optic and a high aspect-ratio multilayer Laue lens—results in an asymmetric optical path in the transmission X-ray microscope. This optics arrangement allows the imaging of 3D nanostructures in opaque objects at a photon energy of 24.2 keV (In-Kα X-ray line). Using a Siemens star test pattern with a minimal feature size of 150 nm, it was proven that features < 150 nm can be resolved. In-Kα radiation is generated from a Ga-In alloy target using a laboratory X-ray source that employs the liquid-metal-jet technology. Since the penetration depth of X-rays into the samples is significantly larger compared to 8 keV photons used in state-of-the-art laboratory X-ray microscopes (Cu-Kα radiation), 3D-nanopattered materials and structures can be imaged nondestructively in mm to cm thick samples. This means that destructive de-processing, thinning or cross-sectioning of the samples are not needed for the visualization of interconnect structures in microelectronic products manufactured using advanced packaging technologies. The application of laboratory transmission X-ray microscopy in the hard X-ray regime is demonstrated for Cu/Cu6Sn5/Cu microbump interconnects fabricated using solid–liquid interdiffusion (SLID) bonding.

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Section: Laboratory Hard X-ray Microscopy—application For Microelectr...mentioning

confidence: 99%

Laboratory X-ray Microscopy of 3D Nanostructures in the Hard X-ray Regime Enabled by a Combination of Multilayer X-ray Optics

Lechowski,

Kutukova,

Grenzer

et al. 2024

Nanomaterials

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“…The very close problem to dose reduction is a total study time reduction. This particular issue is especially important for industrial and nano CT experiments, which may take up to several days [ 4 , 6 , 11 ].…”

Section: Introductionmentioning

confidence: 99%

Applicability and potential of monitored reconstruction in computed tomography

Gilmanov,

Bulatov,

Bugai

et al. 2024

PLoS ONE

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Monitored tomographic reconstruction (MTR) is a potentially powerful tool for dose and time reduction in computed tomography scanning. We are the first to study the issue of practical implementation of MTR protocols in current-generation real-life instruments. We propose an empirical quantitative model for calculating acquisition and reconstruction times. It is demonstrated that projection acquisition order has a significant impact on the time and dose of tomographic experiments. The new alternative acquisition most suitable for MTR protocols is proposed. To estimate the restrictions and scope of applicability for MTR four typical commercial setups are studied within a proposed model. We construct an experimental stand for achieving a real-time reconstruction, together with validation of the proposed acquisition time model. We demonstrate that real-time reconstruction may be implemented without slowing down an acquisition process. An optimization of reconstruction from partial data is proposed, which allowed the production of 385 and 440 reconstructions for standard and proposed acquisition orders correspondingly during a single acquisition of 512 projections. The results of the study demonstrate that with proposed optimizations MTR can be effectively utilized for practical applications using the current generation of existing setups in industrial and nano tomography fields.

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Mechanical Robustness of Patterned Structures and Failure Mechanisms

Zschech¹,

Elizalde

2023

More-Than-Moore Devices and Integration for Semiconductors

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In-situ X-ray tomographic imaging and controlled steering of microcracks in 3D nanopatterned structures

Cited by 5 publications

References 17 publications

Laboratory X-ray Microscopy of 3D Nanostructures in the Hard X-ray Regime Enabled by a Combination of Multilayer X-ray Optics

Laboratory X-ray Microscopy of 3D Nanostructures in the Hard X-ray Regime Enabled by a Combination of Multilayer X-ray Optics

Applicability and potential of monitored reconstruction in computed tomography

Mechanical Robustness of Patterned Structures and Failure Mechanisms

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