2003
DOI: 10.1016/s0030-4018(03)01102-7
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In situ surface roughness measurement using a laser scattering method

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Cited by 53 publications
(30 citation statements)
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“…However, it is possible to measure the displacement in the range ±300 µm. The above mentioned probe has several modifications [22,23]. The instrument has a relatively simple construction.…”
Section: Using Scattered Light For In-process Inspectionmentioning
confidence: 99%
See 2 more Smart Citations
“…However, it is possible to measure the displacement in the range ±300 µm. The above mentioned probe has several modifications [22,23]. The instrument has a relatively simple construction.…”
Section: Using Scattered Light For In-process Inspectionmentioning
confidence: 99%
“…Lu and Tian used a similar approach [24]. This has been implemented in an optical measuring head of a similar design [23]. The instrument was used for in-process measurements of surface roughness (Ra parameter) in the range of 0.05 μm to 1.6 μm.…”
Section: Using Scattered Light For In-process Inspectionmentioning
confidence: 99%
See 1 more Smart Citation
“…Several studies have been performed to inspect the surface roughness of a part based on image processing. These introduced techniques include light scattering [3][4][5][6], laser speckle [7][8][9], and several types of texture analysis [10,11,12].…”
Section: Introductionmentioning
confidence: 99%
“…Fan et al [18] presented a profile measurement system with a low cost DVD pick-up. Tay et al [19] presented an optical surface measurement system that uses the light scattering method, which comprises a laser diode, a measuring lens, and a linear photodiode array. The resolution of the surface measurement system is 0.01 mm.…”
Section: Introductionmentioning
confidence: 99%