the lithiation and delithiation mechanisms of Si and concomitant SEI growth. In situ X-ray diffraction studies [1,7,13] have shown that crystalline silicon (c-Si) particles amorphize during lithiation, forming crystalline Li 15 Si 4 upon complete lithiation, and irreversibly amorphize during delithiation, forming amorphous silicon (a-Si). As a consequence, in the second, and all subsequent cycles, the starting electrode is amorphous as opposed to crystalline. This presents a distinct difference from graphite [14] as well as layered (intercalation) and spinel electrode materials, which typically do not undergo irreversible phase transitions. [15][16][17] Electrochemically, c-Si undergoes lithiation around 0.1 V resulting in a well-defined voltage plateau, while a-Si has multiple sloping lithiation plateaus between 0.4 and 0.1 V. [1,7,13] Transmission electron microscopy (TEM) investigations of crystalline [8,9,11] and amorphous [10,12] Si nanoparticles have reported different mechanisms for Li insertion and extraction, and have unraveled differences between pristine a-Si and a-Si formed from the delithiation of Li x Si. Nevertheless, questions concerning the atomic scale reaction process and (de) lithiation mechanism of a-Si remain unanswered. For example, is the lithiation of a-Si a single-or two-phase reaction? Is this process Li ion diffusion or reaction rate limited, and what role does the SEI play? To address these questions, we exploited in situ X-ray reflectivity (XRR) to study two cycles of lithiation and delithiation of single crystalline Si (100) electrodes, initially terminated with a thin native oxide. A fundamental understanding of these processes at the atomic scale is important, since it will improve our foundational knowledge of basic principles underlying electrochemical reactions of ions with crystalline and amorphous materials. Furthermore, such insights are imperative in order to provide strategies to mitigate irreversible capacity loss in Si anodes.It is now well-established that the SEI is formed as the result of electrolyte decomposition at the anode surface and is an electrically insulating but ionically conducting layer. [18,19] Its passivating nature in general prohibits further electrolyte decomposition. It is a chemically complex, inhomogeneous surface layer with an inner part, at the electrode/SEI interface, mostly containing inorganic components that block electrolyte transport and ingress, and an outer part, at the SEI/electrolyte interface made up of mainly organic species. [20][21][22] The inner part of the SEI is mainly composed of inorganic Li compounds such as Li-silicates, Li 2 CO 3 , Li 2 O, LiF, and LiOH; [23,24] the outer While silicon (Si) has tenfold capacity of commercially used graphite, its application is still limited due to its limited cyclability. In this in situ X-ray reflectivity study, a detailed mechanistic model of the first two (de)lithiation processes of a silicon wafer is presented, which sheds light onto the fundamental difference of the reaction of Li ions ...