In‐situ spectroscopic ellipsometry: optimization of monitoring and closed‐loop‐control procedures

Abstract

We discuss optimized extraction of information contained in a series of complex reflectance ratios in a series of consecutive, in‐situ SE measurements during the growth of thin films. We present a general computational scheme and discuss guidelines for the optimum data treatment. As an example, we analyze several hundreds of spectra recorded during the growth of diamond‐like carbon on TiCN/steel substrate. (© 2008 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)

Spectroscopic ellipsometry and polarimetry for materials and systems analysis at the nanometer scale: state-of-the-art, potential, and perspectives

“…Consequently, the optical absorption is located mainly in the ultraviolet; it shifts toward visible range during the later stages of deposition, due to the better tetrahedral bonding of the growing material. This behavior is indeed observed via a pronounced redshift of the spectral weight of the retrieved optical functions (Humlíček 2008 ). Even if only the temporal evolution of the film thickness d was important, it would not be possible to retrieve it from the data without an adequate knowledge of the optical constants.…”

“…Consequently, the optical absorption is located mainly in the ultraviolet; it shifts toward visible range during the later stages of deposition, due to the better tetrahedral bonding of the growing material. This behavior is indeed observed via a pronounced redshift of the spectral weight of the retrieved optical functions (Humlíček 2008 ).…”

Real-Time Ellipsometry at High and Low Temperatures

“…Zapien et al 28 and the demonstration of SE in an industrial environment, integrating it into a vertical furnace by W. Lehnert et al 18 to follow layer growth during batch processing ( Figure 2 ). 29 Integration of SE in a chemical vapor deposition tool has been demonstrated by C. Eitzinger et al 30 J. Humlicek 31 proposed a general scheme of analyzing the film growth in this tool using a series of in situ SE spectra in a closed-loop system.…”