In Situ Reaction Mechanism Studies on Lithium Hexadimethyldisilazide and Ozone Atomic Layer Deposition Process for Lithium Silicate

Tomczak, Yoann; Knapas, Kjell; Sundberg, Markku R.; Leskelä, Markku; Ritala, Mikko

doi:10.1021/jp312309g

Cited by 22 publications

(35 citation statements)

References 37 publications

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“…Yoann Tomczak et al . studied lithium hexadimethyldisilazide and ozone ALD of lithium silicate31. A similar case showing the molecular or stoichiometric adsorption of LiHDMS followed its complete combustion.…”

Section: Resultsmentioning

confidence: 99%

Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes

Chen

Wang

Xiao

et al. 2017

Sci Rep

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Encapsulation is essential to protect the air-sensitive components of organic light-emitting diodes (OLEDs) such as active layers and cathode electrodes. In this study, hybrid zirconium inorganic/organic nanolaminates were fabricated using remote plasma enhanced atomic layer deposition (PEALD) and molecular layer deposition at a low temperature. The nanolaminate serves as a thin-film encapsulation layer for OLEDs. The reaction mechanism of PEALD process was investigated using an in-situ quartz crystal microbalance (QCM) and in-situ quadrupole mass spectrometer (QMS). The bonds present in the films were determined by Fourier transform infrared spectroscopy. The primary reaction byproducts in PEALD, such as CO, CO2, NO, H2O, as well as the related fragments during the O2 plasma process were characterized using the QMS, indicating a combustion-like reaction process. The self-limiting nature and growth mechanisms of the ZrO2 during the complex surface chemical reaction of the ligand and O2 plasma were monitored using the QCM. The remote PEALD ZrO2/zircone nanolaminate structure prolonged the transmission path of water vapor and smooth surface morphology. Consequently, the water barrier properties were significantly improved (reaching 3.078 × 10−5 g/m2/day). This study also shows that flexible OLEDs can be successfully encapsulated to achieve a significantly longer lifetime.

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Section: Resultsmentioning

confidence: 99%

Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes

Chen

Wang

Xiao

et al. 2017

Sci Rep

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“…The LiHMDS precursor may be used as a single source precursor for deposition of lithium silicates such as Li 2 SiO 3 by reacting with ozone in a sequential manner . The ozone will also oxidize the ligands resulting in a film containing both lithium and silicon.…”

Section: Li‐materials By Aldmentioning

confidence: 99%

“…The stoichiometry of the deposited film changed somewhat with temperature providing a decreasing Li content with increasing deposition temperature. The growth has been investigated by in situ techniques such as QCM and MS at different temperatures . The investigation indicates a somewhat complex reaction path which does not involve direct ligand exchange between hydroxyl and LiHMDS.…”

Section: Li‐materials By Aldmentioning

confidence: 99%

Atomic layer deposition of functional films for Li‐ion microbatteries

Nilsen

Miikkulainen

Gandrud

et al. 2013

Physica Status Solidi (a)

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The lithium ion battery concept is a promising energy storage system, both for larger automotive systems and smaller mobile devices. The smallest of these, the microbatteries, are commonly based on the all‐solid state concept consisting of thin layers of electroactive materials separated by a solid state electrolyte. The fact that solid state electrolytes are required puts rather severe constraints on the materials in terms of electronic and ionic conductivity, as well as lack of pinholes otherwise leading to self‐discharge. The atomic layer deposition (ALD) technology is especially suitable for realization of such microbatteries for the Li‐ion technology. ALD has an inherent nature to deposit conformal and pinhole free layers on complex geometrical shapes, an architecture most commonly adopted for microbattery designs. The current paper gives an overview of ALD‐type deposition processes of functional battery materials, including cathodes, electrolytes, and anodes with the aim of developing all‐solid‐state batteries. Deposition of Li‐containing materials by the ALD technique appears challenging and the status of current efforts is discussed.

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“…The process exhibited good ALD behaviour at 250 • C, with saturation of both precursors seen and the film thickness increased linearly with the number of cycles. However, no ALD window was present and instead the growth rate increased from approximately 0.3 Å/cycle at 150 • C to 1.7 Å/cycle at 400 • C. This increase was explained with subsequent reaction mechanism studies [111]. The HMDS-ligand of the metal precursor reacts with surface hydroxyl groups, decomposing to different side products.…”

Section: Solid Electrolytesmentioning

confidence: 98%

“…Lithium silicates can have reasonably high lithium-ion conductivities, especially in the amorphous state [125][126][127]. The silylamide precursor LiHMDS (lithium hexamethyldisilazide) provides a convenient route to lithium silicate deposition when combined with ozone [110,111]. The process exhibited good ALD behaviour at 250 • C, with saturation of both precursors seen and the film thickness increased linearly with the number of cycles.…”

Section: Solid Electrolytesmentioning

confidence: 99%

Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective

2018

Self Cite

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Lithium-ion batteries are the enabling technology for a variety of modern day devices, including cell phones, laptops and electric vehicles. To answer the energy and voltage demands of future applications, further materials engineering of the battery components is necessary. To that end, metal fluorides could provide interesting new conversion cathode and solid electrolyte materials for future batteries. To be applicable in thin film batteries, metal fluorides should be deposited with a method providing a high level of control over uniformity and conformality on various substrate materials and geometries. Atomic layer deposition (ALD), a method widely used in microelectronics, offers unrivalled film uniformity and conformality, in conjunction with strict control of film composition. In this review, the basics of lithium-ion batteries are shortly introduced, followed by a discussion of metal fluorides as potential lithium-ion battery materials. The basics of ALD are then covered, followed by a review of some conventional lithium-ion battery materials that have been deposited by ALD. Finally, metal fluoride ALD processes reported in the literature are comprehensively reviewed. It is clear that more research on the ALD of fluorides is needed, especially transition metal fluorides, to expand the number of potential battery materials available.

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In Situ Reaction Mechanism Studies on Lithium Hexadimethyldisilazide and Ozone Atomic Layer Deposition Process for Lithium Silicate

Cited by 22 publications

References 37 publications

Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes

Low-temperature remote plasma enhanced atomic layer deposition of ZrO2/zircone nanolaminate film for efficient encapsulation of flexible organic light-emitting diodes

Atomic layer deposition of functional films for Li‐ion microbatteries

Metal Fluorides as Lithium-Ion Battery Materials: An Atomic Layer Deposition Perspective

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