“…Ni silicides have gained the considerable importance for their favorable chemical stability, low resistance, low work function, high process compatibility, and low formation temperature. [8] In situ observation technique are used to conduct the experiments for real-time acquisition and analysis of materials during the reaction, such as in situ X-ray photoelectron spectroscopy, [9] in situ Fourier-transform infrared spectro scopy, [10] in situ surface-enhanced Raman spectroscopy, [11] in situ X-ray diffraction, [12] and in situ synchrotron transmission X-ray microscopy. [13] Among these techniques, in situ transmission electron microscopy (TEM) has the capability to obtain the dynamic information, such as diffusion, [14] crystal growth, [15] and phase transformation at nanoscale.…”