In-Situ Monitoring of Metal Dissolution during Anodization of Tantalum

Abstract

The dissolution of Ta in acidic media during both potentiodynamic and potentiostatic anodic oxide formation was quantified in-situ by ICP-MS. Potentiodynamic polarization yields a constant dissolution rate of 4 pg s −1 cm −2 (5 fm s −1 ) while a continuous dissolution rate decay was observed during potentiostatic anodization. The rate of Ta species release increased with applied potential in good agreement to the measured current density transients. A higher percentage of the charge carriers was identified as responsible for generation of soluble Ta species in potentiostatic regime as compared to potentiodynamic oxide growth. The current efficiency of anodization was determined from the combined investigation to exceed 99.9%.

Atomic Emission Spectroelectrochemistry: Real-Time Rate Measurements of Dissolution, Corrosion, and Passivation

“…Continuous in-line experiments have been conducted using ICP-MS in particular using a scanning droplet cell (SDC) as developed at the Max Planck Institute in Düsselorf by Klemm, et al [25][26][27][28] Using either the SDC or a conventional flow cell, ICP-MS has been used to investigate the corrosion of Mg, Al, and Ni alloys, [29][30][31][32][33][34] the kinetics of the degradation of heterogeneous catalysts, [26][27][35][36][37][38] and to detect partial currents during anodization. [39][40][41][42][43][44] Recently, Lopes, et al, 45 moved away from the flow cell technique to directly sample the electrolyte in the vicinity of a rotating disk electrode with transfer to an ICP-MS to investigate the dissolution of Pt single crystals.…”

Electrochemical Tantalum Oxide for Resistive Switching Memories

“…[21,22] Most important, anodizing allows to grow oxides with well-defined characteristics such as thickness, composition, structure and morphology by easily controlling operating parameters such as formation potential, growth rate, electrolyte and metal substrate compositions. [23][24][25][26][27][28][29] In the case of anodizing of metallic alloys, resulting oxide will be a mixed oxide in which the atomic ratio between partner metals can be different with respect to the underlying alloys depending on transport numbers of involved cations. To date, there are several papers in which porous anodic aluminum oxide is used as a matrix for the fabrication of ReRAMs [30][31][32][33] or anodic nanostructured oxides are used as solid electrolytes, [34][35][36][37][38] but only few papers discuss on ReRAMs devices with barriertype anodic oxides however not showing some particular promises.…”

Impact of Femtosecond Laser Treatment Accompanied with Anodization of Titanium Alloy on Fibroblast Cell Growth

“…Nevertheless, the dissolution of vanadium and aluminum (that are considered as toxic materials) into the body is a matter of concern for future usage . The ionic dissolution is dependent upon the corrosion rate and it is a well‐known fact that the corrosion rate of valve metals can be significantly decreased by anodization …”