In-situ Monitoring and Determination of AlGaAs Composition During MOCVD Growth

Peng-cheng, 王鹏程 Wang; Hua-wei, 徐华伟 Xu; Jinlong, 张金龙 Zhang; Yongqiang, 宁永强 Ning

doi:10.3788/fgxb20123309.0985

发光学报

2012

DOI: 10.3788/fgxb20123309.0985

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In-situ Monitoring and Determination of AlGaAs Composition During MOCVD Growth

王鹏程 Wang Peng-cheng¹,

徐华伟 Xu Hua-wei²,

张金龙 Zhang Jinlong³

et al.

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In-situ Monitoring and Determination of AlGaAs Composition During MOCVD Growth

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