1989
DOI: 10.1149/1.2096852
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In Situ Ellipsometry to Monitor Swelling and Dissolution of Thin Polymer Films

Abstract: Thin polymer films are used as resists in the fabrication of integrated circuits. In an attempt to improve resist processing methodology, an in situ rotating-analyzer ellipsometer has been designed for monitoring swelling and dissolution of thin polymer films. Equipment details, procedures, precision and accuracy, and data interpretation are discussed. The instrument discussed here has a precision of 0.5 nm and an accuracy of 2.9 nm when measuring the thickness of a 150 nm SiQ film in air. For polymer/solvent … Show more

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Cited by 41 publications
(34 citation statements)
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“…There are a number of experimental techniques available to determine the diffusion coefficient of a particular compound in a polymer film, including scanning IR microscopy, light scattering, neutron scattering, nuclear magnetic resonance, Raman scattering, IR spectroscopy, and elipsometry [32][33][34][35]. Our experimental procedure is an established standard physical chemistry technique and gives an estimation of the diffusion rates in the material.…”
Section: Experimental Methods To Find Dmentioning
confidence: 99%
“…There are a number of experimental techniques available to determine the diffusion coefficient of a particular compound in a polymer film, including scanning IR microscopy, light scattering, neutron scattering, nuclear magnetic resonance, Raman scattering, IR spectroscopy, and elipsometry [32][33][34][35]. Our experimental procedure is an established standard physical chemistry technique and gives an estimation of the diffusion rates in the material.…”
Section: Experimental Methods To Find Dmentioning
confidence: 99%
“…[69][70][71][72][73][74] In these measurements the changes in a conjugated polymer fi lm's refractive index and thickness are monitored in a non-absorbing spectral region while the sample is exposed to controlled amounts of the co-solvent vapor (for experimental details, see the Supporting Information (SI)). Since most of the previous work on SqP is focused on P3HT, [ 20,22,37,38,48,56,57 ] we begin by examining the volume changes of swollen thin fi lms of P3HT that have varying degrees of crystallinity.…”
Section: Using Porosimetry-ellipsometry To Quantify Conjugated Polymementioning
confidence: 99%
“…The basics of ellipsometric measurements were explained by Papanu et al [112] with the aid of Fig. 40.…”
Section: Ellipsometrymentioning
confidence: 99%