In situ deposition of PbTiO3 thin films by direct current reactive magnetron sputtering

Influence of the Annealing Environment on the Structure and Ferroelectric Properties of Lead Titanate Thin Films

“…It should be noted that the crystalline nature of PbTiO 3 thin films strongly depends on the substrate material and the substrate temperature when films are grown using direct current magnetron sputtering [20,22]. A silicon substrate does not fit for lead titanate formation because of the large lattice mismatch between Si and lead titanate.…”

“…O. Azaroual et al [29] found that the PbTiO 3 films deposited using the sol-gel technique and annealed at 650 • C showed a remnant polarization of 18 µC/cm 2 and coercive field of 121 kV/cm. Our previous studies [20][21][22] demonstrated that the phase structure, surface morphology and ferroelectric properties of the PbTiO 3 films strongly depended on the substrate temperature or postdeposition annealing conditions. It was observed that the c/a ratio and crystallite size of the PbTiO 3 films annealed at 770 o C depend on the Pb/Ti ratio [21].…”

“…However, the use equipment is expensive, and to obtain the desirable film composition, an adapted target composition is required [15,16]. Magnetron sputtering is one of the most prospective methods for PbTiO 3 thin film formation because of its high deposition rate, the possibility of using commercially available large area deposition systems, the control of the substrate temperature during the deposition and the relatively low cost [12,15,17,[20][21][22][23][24]. R. Nishino et al [15] investigated thin PbTiO 3 films synthesized using pulsed laser deposition and discovered that the remnant polarization depended on the thickness of the PbTiO 3 films.…”

“…It was observed that the c/a ratio and crystallite size of the PbTiO 3 films annealed at 770 o C depend on the Pb/Ti ratio [21]. The PbTiO 3 films formed in situ on the hot substrates (temperature varied from 450 to 550 • C) showed a remnant polarization of 60 µC/cm 2 and coercive field of 150 kV/cm [20]. The structure and ferroelectric properties of PbTiO 3 films annealed in air at various temperatures are studied the most [14,17,29].…”

Role of depolarization in the polarization reversal in ferroelectrics

“…Experimentally, the coercive field depends on the electric field frequency, material, sample type (ceramics or single crystal), grain size, sample thickness, temperature, orientation, and others. For example, for a prototypical ferroelectric PbTiO 3 , E c is in the range 0.053-0.250 MV/cm 1,2 . Not surprising, the subject of polarization reversal remains the focus of attention for decades [3][4][5][6][7][8] .…”