In situ 3D profilometry of rough objects with a lateral shearing interferometry range finder

Frade, María; Enguita, J.M.; Álvarez, Ignacio

doi:10.1016/j.optlaseng.2012.04.012

Cited by 8 publications

(4 citation statements)

References 23 publications

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“…The optical device has many characteristics that make it an excellent candidate for in-process or in-machine integration: its common path nature makes it quite insensitive to vibrations and other environmental conditions, it is able to operate from a large working distance (above 90mm for this prototype), and it has a large depth of field (about 4 mm). The precision of the sensor with this configuration is σ < 88 nm with an accuracy of 40 nm and a repeatability of σ = 10 nm, as reported in [23]. …”

Section: Discussionsupporting

confidence: 70%

“…The formal derivation of fringe formation has been developed in depth in [23]. Here we will only outline the main results needed to follow the working principle of the sensor and the processing method.…”

Section: Methodsmentioning

confidence: 99%

“…Schematic setup as observed from the direction perpendicular to the profile, zy plane (first appeared in [23], reprinted with permission).…”

Section: Figurementioning

confidence: 99%

“…This device, described in [23], is able to obtain distance profiles of 19 mm in a single shot, from a working distance greater than 90 mm, and a large depth of field (around 4 mm), with depth precisions of σ = 88 nm. Its characteristics make it ideal for its application in automatic surface inspection systems.…”

Section: Introductionmentioning

confidence: 99%

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In-Situ Waviness Characterization of Metal Plates by a Lateral Shearing Interferometric Profilometer

Frade

Enguita

Ignacio

2013

Sensors

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Characterizing waviness in sheet metal is a key process for quality control in many industries, such as automotive and home appliance manufacturing. However, there is still no known technique able to work in an automated in-floor inspection system. The literature describes many techniques developed in the last three decades, but most of them are either slow, only able to work in laboratory conditions, need very short (unsafe) working distances, or are only able to estimate certain waviness parameters. In this article we propose the use of a lateral shearing interferometric profilometer, which is able to obtain a 19 mm profile in a single acquisition, with sub-micron precision, in an uncontrolled environment, and from a working distance greater than 90 mm. This system allows direct measurement of all needed waviness parameters even with objects in movement. We describe a series of experiments over several samples of steel plates to validate the sensor and the processing method, and the results are in close agreement with those obtained with a contact stylus device. The sensor is an ideal candidate for on-line or in-machine fast automatic waviness assessment, reducing delays and costs in many metalworking processes.

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Section: Discussionsupporting

confidence: 70%

Section: Methodsmentioning

confidence: 99%

“…Schematic setup as observed from the direction perpendicular to the profile, zy plane (first appeared in [23], reprinted with permission).…”

Section: Figurementioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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